| MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA a Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. In ICDS-25, 25th International Conference on Defects in Semiconductors, July 20-24, 2009 in St. Petersburg. 2009. ISBN 978-5-93634-048-2. |
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@proceedings{862560,
author = {Meduňa, Mojmír and Caha, Ondřej and Kuběna, Josef and Kuběna, Alan and Buršík, Jiří},
booktitle = {ICDS-25, 25th International Conference on Defects in Semiconductors, July 20-24, 2009 in St. Petersburg},
keywords = {Silicon; Infra red; Precipitates},
language = {eng},
isbn = {978-5-93634-048-2},
title = {Homogenization of CZ Si wafers by Tabula Rasa annealing},
year = {2009}
}
TY - CONF
ID - 862560
AU - Meduňa, Mojmír - Caha, Ondřej - Kuběna, Josef - Kuběna, Alan - Buršík, Jiří
PY - 2009
TI - Homogenization of CZ Si wafers by Tabula Rasa annealing
SN - 9785936340482
KW - Silicon
KW - Infra red
KW - Precipitates
N2 - The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction.
ER -
MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA a Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. In \textit{ICDS-25, 25th International Conference on Defects in Semiconductors, July 20-24, 2009 in St. Petersburg}. 2009. ISBN~978-5-93634-048-2.
|
