2010
Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
NAVRÁTIL, Zdeněk; Pavel DVOŘÁK; Oto BRZOBOHATÝ and David TRUNECBasic information
Original name
Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
Name in Czech
Stanovení koncentrace a teploty elektronů v kapacitně vázaném RF výboje v neonu z OES doplněné CR modelem
Authors
NAVRÁTIL, Zdeněk (203 Czech Republic, guarantor, belonging to the institution); Pavel DVOŘÁK (203 Czech Republic, belonging to the institution); Oto BRZOBOHATÝ (203 Czech Republic) and David TRUNEC (203 Czech Republic, belonging to the institution)
Edition
Journal of Physics D: Applied Physics, Bristol, England, IOP Publishing Ltd. 2010, 0022-3727
Other information
Language
English
Type of outcome
Article in a journal
Field of Study
10305 Fluids and plasma physics
Country of publisher
United Kingdom of Great Britain and Northern Ireland
Confidentiality degree
is not subject to a state or trade secret
References:
Impact factor
Impact factor: 2.109
RIV identification code
RIV/00216224:14310/10:00040634
Organization unit
Faculty of Science
UT WoS
000284942800007
Keywords in English
High-frequency and RF discharges; Particle-in-cell method; Transport properties; Monte Carlo methods; Optical measurements
Tags
International impact, Reviewed
Changed: 3/1/2011 11:21, doc. Mgr. Pavel Dvořák, Ph.D.
Abstract
In the original language
A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional-radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional-radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional particle-in-cell/Monte Carlo (PIC/MC) simulation. The results of OES/CRM and PIC/MC method were in close agreement in the case of electron temperature in the vicinity of a driven electrode. The determined value of electron temperature was about 8 eV. In bulk plasma, the measured spectra were not satisfactorily fitted. In the case of electron density only relative agreement was obtained between OES/CRM and Langmuir probe measurement; the absolute values differed by a factor of 5. The axial dependence of electron density calculated by PIC/MC was distinct from them, reaching the maximum values between the results of the other two methods. The investigation of power dependence of plasma parameters close to the driven electrode showed a decrease in electron temperature and an increase in electron density together with increasing incoming RF power. The calculated spectra fitted very well the measured spectra in this discharge region.
Links
| GA202/07/1669, research and development project |
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| GA202/09/0800, research and development project |
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| KAN101630651, research and development project |
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| MSM0021622411, plan (intention) |
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