| MÜNZ, Filip, Josef HUMLÍČEK a Přemysl MARŠÍK. Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry. Thin Solid Films. Elsevier, 2011, roč. 519, č. 9, s. 2703-2706. ISSN 0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.063. |
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@article{913191,
author = {Münz, Filip and Humlíček, Josef and Maršík, Přemysl},
article_number = {9},
doi = {http://dx.doi.org/10.1016/j.tsf.2010.12.063},
keywords = {ellipsometry: spectroscopic; analyzer: rotating},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry},
volume = {519},
year = {2011}
}
TY - JOUR
ID - 913191
AU - Münz, Filip - Humlíček, Josef - Maršík, Přemysl
PY - 2011
TI - Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
JF - Thin Solid Films
VL - 519
IS - 9
SP - 2703-2706
EP - 2703-2706
PB - Elsevier
SN - 00406090
KW - ellipsometry: spectroscopic
KW - analyzer: rotating
N2 - Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time. The optimization concerns the choice of measurement parameters as well as the subsequent data analysis. We present in detail examples of visible-ultraviolet measurements.
ER -
MÜNZ, Filip, Josef HUMLÍČEK a Přemysl MARŠÍK. Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry. \textit{Thin Solid Films}. Elsevier, 2011, roč.~519, č.~9, s.~2703-2706. ISSN~0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.063.
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