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@proceedings{930176,
author = {Muresan, Mihai George and Zajíčková, Lenka and Franta, Daniel and Nečas, David},
booktitle = {11th International Balkan Workshop on Applied Physics 2010},
keywords = {diamond-like carbon; nitrogen; pecvd; optical properties},
language = {eng},
isbn = {978-973-614-554-4},
title = {OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS},
url = {http://www.univ-ovidius.ro/ibwap2010/},
year = {2010}
}
TY - CONF
ID - 930176
AU - Muresan, Mihai George - Zajíčková, Lenka - Franta, Daniel - Nečas, David
PY - 2010
TI - OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS
SN - 9789736145544
KW - diamond-like carbon
KW - nitrogen
KW - pecvd
KW - optical properties
UR - http://www.univ-ovidius.ro/ibwap2010/
N2 - Amorphous hydrogenated carbon films can be used, besides tribological applications, in photonics. It can include such applications like antireflective coatings, photosensitive materials or thickness monitoring. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. These effects can be achieved by doping with nitrogen. In this contribution, nitrogen doped diamond-like carbon films (DLC:N) were deposited on silicon substrates by plasma enhanced chemical vapor deposition (PECVD) method using a mixture of methane, hydrogen and nitrogen as reactants. Discharge was excited in capacitively coupled configuration at 13.56 MHz. The bias voltage, working pressure and temperature were changed to vary film optical properties. The optical properties of the films were investigated using UV-VIS reflectometry, ellipsometry and FTIR transmittance measurement.
ER -
MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA a David NEČAS. OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS. In \textit{11th International Balkan Workshop on Applied Physics 2010}. 2010. ISBN~978-973-614-554-4.
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