Diamond-Like Carbon film for protective use on glass and
polymer surfaces

a 2010

Diamond-Like Carbon film for protective use on glass and polymer surfaces

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA a David NEČAS

Základní údaje

Originální název

Diamond-Like Carbon film for protective use on glass and polymer surfaces

Autoři

MURESAN, Mihai George (642 Rumunsko, garant, domácí), Lenka ZAJÍČKOVÁ (203 Česká republika, domácí), Daniel FRANTA (203 Česká republika, domácí) a David NEČAS (203 Česká republika, domácí)

Vydání

Potential and applications of surface nanotreatment of polymers and glass, 2010

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Kód RIV

RIV/00216224:14310/10:00047541

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

DLC; pecvd; glass; polymers; hardness

Změněno: 14. 3. 2011 19:34, Mihai George Muresan, Ph.D., M.Sc.

Anotace

V originále

Amorphous hydrogenated carbon films can be used, besides tribological applications for optical applications. It can include antireflective coatings, photosensitive materials, scratch resistant glass and polymer surfaces. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane and hydrogen on silicon and glass substrates. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. . The optical properties of the films were investigated using UV-VIS reflectometry and ellipsometry. Mechanical tests, in form of depth sensing indentation, were also performed. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, grant agency GACR No. 104/09/H080

Návaznosti

GD104/09/H080, projekt VaV

Název: Plazmochemické procesy a jejich technologické aplikace

Investor: Grantová agentura ČR, Plazmochemické procesy a jejich technologické aplikace

MSM0021622411, záměr

Název: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA a David NEČAS. Diamond-Like Carbon film for protective use on glass and polymer surfaces. In Potential and applications of surface nanotreatment of polymers and glass. 2010.

@proceedings{930234,
   author = {Muresan, Mihai George and Zajíčková, Lenka and Franta, Daniel and Nečas, David},
   booktitle = {Potential and applications of surface nanotreatment of polymers and glass},
   keywords = {DLC; pecvd; glass; polymers; hardness},
   language = {eng},
   title = {Diamond-Like Carbon film for protective use on glass and polymer surfaces},
   url = {http://www2.nanocontact.cz/en/gallery/conferences/pasnpg?NSUSR=2a7os7rvb5a2i76omaudhvsrk1},
   year = {2010}
}

TY  - CONF
ID  - 930234
AU  - Muresan, Mihai George - Zajíčková, Lenka - Franta, Daniel - Nečas, David
PY  - 2010
TI  - Diamond-Like Carbon film for protective use on glass and polymer surfaces
KW  - DLC
KW  - pecvd
KW  - glass
KW  - polymers
KW  - hardness
UR  - http://www2.nanocontact.cz/en/gallery/conferences/pasnpg?NSUSR=2a7os7rvb5a2i76omaudhvsrk1
N2  - Amorphous hydrogenated carbon films can be used, besides tribological applications for optical applications. It can include antireflective coatings, photosensitive materials, scratch resistant glass and polymer surfaces. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane and hydrogen on silicon and glass substrates. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. . The optical properties of the films were investigated using UV-VIS reflectometry and ellipsometry. Mechanical tests, in form of depth sensing indentation, were also performed. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, grant agency GACR No. 104/09/H080
ER  -

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA a David NEČAS. Diamond-Like Carbon film for protective use on glass and polymer surfaces. In \textit{Potential and applications of surface nanotreatment of polymers and glass}. 2010.

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