| STOICA, Adrian, Rodica VLADOIU, Geavit MUSA, Victor CIUPINA, Mirela CONTULOV, Vilma BURŠÍKOVÁ a Olga BLÁHOVÁ. Mechanical properties of thin films deposited by TVA and G-TVA methods. Chemicke Listy. Praha: Asociace českých chemických společností, 2011, roč. 105/2011, č. 14, s. 132-135. ISSN 0009-2770. |
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@article{935652,
author = {Stoica, Adrian and Vladoiu, Rodica and Musa, Geavit and Ciupina, Victor and Contulov, Mirela and Buršíková, Vilma and Bláhová, Olga},
article_location = {Praha},
article_number = {14},
keywords = {Thermionic Vacuum Arc; Gaseous Thermionic Vacuum Arc; DLC coatings; nanoindentation},
language = {eng},
issn = {0009-2770},
journal = {Chemicke Listy},
title = {Mechanical properties of thin films deposited by TVA and G-TVA methods},
url = {http://www.chemicke-listy.cz/common/article-vol_105-issue_14-page_s132.html},
volume = {105/2011},
year = {2011}
}
TY - JOUR
ID - 935652
AU - Stoica, Adrian - Vladoiu, Rodica - Musa, Geavit - Ciupina, Victor - Contulov, Mirela - Buršíková, Vilma - Bláhová, Olga
PY - 2011
TI - Mechanical properties of thin films deposited by TVA and G-TVA methods
JF - Chemicke Listy
VL - 105/2011
IS - 14
SP - 132-135
EP - 132-135
PB - Asociace českých chemických společností
SN - 00092770
KW - Thermionic Vacuum Arc
KW - Gaseous Thermionic Vacuum Arc
KW - DLC coatings
KW - nanoindentation
UR - http://www.chemicke-listy.cz/common/article-vol_105-issue_14-page_s132.html
N2 - The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon.
ER -
STOICA, Adrian, Rodica VLADOIU, Geavit MUSA, Victor CIUPINA, Mirela CONTULOV, Vilma BURŠÍKOVÁ a Olga BLÁHOVÁ. Mechanical properties of thin films deposited by TVA and G-TVA methods. \textit{Chemicke Listy}. Praha: Asociace českých chemických společností, 2011, roč.~105/2011, č.~14, s.~132-135. ISSN~0009-2770.
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