| NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterisation of thin films non-uniform in thickness. Thin Solid Films. Elsevier, 2011, roč. 519, č. 9, s. 2715-2717. ISSN 0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.065. |
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@article{940454,
author = {Nečas, David and Franta, Daniel and Buršíková, Vilma and Ohlídal, Ivan},
article_number = {9},
doi = {http://dx.doi.org/10.1016/j.tsf.2010.12.065},
keywords = {Optical characterisation; Variable angle spectroscopic ellipsometry; Phase-modulated ellipsometry; Non-uniform thin films},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Ellipsometric characterisation of thin films non-uniform in thickness},
url = {http://dx.doi.org/10.1016/j.tsf.2010.12.065},
volume = {519},
year = {2011}
}
TY - JOUR
ID - 940454
AU - Nečas, David - Franta, Daniel - Buršíková, Vilma - Ohlídal, Ivan
PY - 2011
TI - Ellipsometric characterisation of thin films non-uniform in thickness
JF - Thin Solid Films
VL - 519
IS - 9
SP - 2715-2717
EP - 2715-2717
PB - Elsevier
SN - 00406090
KW - Optical characterisation
KW - Variable angle spectroscopic ellipsometry
KW - Phase-modulated ellipsometry
KW - Non-uniform thin films
UR - http://dx.doi.org/10.1016/j.tsf.2010.12.065
N2 - Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness nonuniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined.
ER -
NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterisation of thin films non-uniform in thickness. \textit{Thin Solid Films}. Elsevier, 2011, roč.~519, č.~9, s.~2715-2717. ISSN~0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.065.
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