Optimized Plasma Enhanced Chemical Vapor Deposition from
HMDSO/O2 for Surface Protection of Metals

a 2011

Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Václav PEKAŘ, Vilma BURŠÍKOVÁ, Pavel ONDRAČKA et. al.

Základní údaje

Originální název

Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals

Autoři

MURESAN, Mihai George (642 Rumunsko, garant, domácí), Lenka ZAJÍČKOVÁ (203 Česká republika, domácí), Václav PEKAŘ (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Pavel ONDRAČKA (203 Česká republika, domácí), Anna CAMPBELLOVÁ (203 Česká republika, domácí), Vratislav PEŘINA (203 Česká republika) a Romana MIKŠOVÁ (203 Česká republika)

Vydání

3rd International Conference Nanocon, Brno, 2011

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/11:00050062

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

SiO2; Aluminium; Steel; PECVD

Změněno: 5. 12. 2011 13:57, Mihai George Muresan, Ph.D., M.Sc.

Anotace

V originále

The coatings were obtained from mixtures of hexamethyldisiloxane (HMDSO) with oxygen using a radio frequency capacitively coupled glow discharge at 13.56 MHz. Deposition of SiO2-like films from 8% HMDSO/O2 were found to have low internal stress, high fracture toughness and high hardness. Different pressures were used in order to obtain the best properties of the films. These dual purpose films can be used as a transparent protective coatings for aluminum substrates or a intermediate layer for harder coatings with good adhesion on stainless steel. The films were optically characterized by spectroscopic ellipsometry and reflectometry. Complete atomic composition was determined by ion beam analysis (RBS/ERDA). Infrared spectroscopy was used for the chemical bonds assessment. Hardness, elastic modulus and scratch test were performed. Surface energy measurements indicated hydrophilic character of the coatings, an important factor for industrial applications. This work was supported by the Czech Ministry of Education, under project MSM 0021622411 the Grant Agency of Czech Republic project GACR 104/09/H080.

Návaznosti

GD104/09/H080, projekt VaV

Název: Plazmochemické procesy a jejich technologické aplikace

Investor: Grantová agentura ČR, Plazmochemické procesy a jejich technologické aplikace

MSM0021622411, záměr

Název: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Václav PEKAŘ, Vilma BURŠÍKOVÁ, Pavel ONDRAČKA, Anna CAMPBELLOVÁ, Vratislav PEŘINA a Romana MIKŠOVÁ. Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals. In 3rd International Conference Nanocon, Brno. 2011.

@proceedings{953442,
   author = {Muresan, Mihai George and Zajíčková, Lenka and Pekař, Václav and Buršíková, Vilma and Ondračka, Pavel and Campbellová, Anna and Peřina, Vratislav and Mikšová, Romana},
   booktitle = {3rd International Conference Nanocon, Brno},
   keywords = {SiO2; Aluminium; Steel; PECVD},
   language = {eng},
   title = {Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals},
   year = {2011}
}

TY  - CONF
ID  - 953442
AU  - Muresan, Mihai George - Zajíčková, Lenka - Pekař, Václav - Buršíková, Vilma - Ondračka, Pavel - Campbellová, Anna - Peřina, Vratislav - Mikšová, Romana
PY  - 2011
TI  - Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals
KW  - SiO2
KW  - Aluminium
KW  - Steel
KW  - PECVD
N2  - The coatings were obtained from mixtures of hexamethyldisiloxane (HMDSO) with oxygen using a radio frequency capacitively coupled glow discharge at 13.56 MHz. Deposition of SiO2-like films from 8% HMDSO/O2 were found to have low internal stress, high fracture toughness and high hardness. Different pressures were used in order to obtain the best properties of the films. These dual purpose films can be used as a transparent protective coatings for aluminum substrates or a intermediate layer for harder coatings with good adhesion on stainless steel. The films were optically characterized by spectroscopic ellipsometry and reflectometry. Complete atomic composition was determined by ion beam analysis (RBS/ERDA). Infrared spectroscopy was used for the chemical bonds assessment. Hardness, elastic modulus and scratch test were performed. Surface energy measurements indicated hydrophilic character of the coatings, an important factor for industrial applications. This work was supported by the Czech Ministry of Education, under project MSM 0021622411 the Grant Agency of Czech Republic project GACR 104/09/H080.
ER  -

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Václav PEKAŘ, Vilma BURŠÍKOVÁ, Pavel ONDRAČKA, Anna CAMPBELLOVÁ, Vratislav PEŘINA a Romana MIKŠOVÁ. Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals. In \textit{3rd International Conference Nanocon, Brno}. 2011.

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