KUBĚNA, Josef, Alan KUBĚNA, Ondřej CAHA a Mojmír MEDUŇA. Homogeneous and heterogeneous nucleation of oxygen in Si-CZ. Solid State Phenomena. Switzerland: Trans Tech Publications, 2011, Neuveden, 178-179, s. 495-500. ISSN 1012-0394. |
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@article{964585, author = {Kuběna, Josef and Kuběna, Alan and Caha, Ondřej and Meduňa, Mojmír}, article_location = {Switzerland}, article_number = {178-179}, keywords = {Interstitials; Nucleation; Precipitation; Silicon; Vacancies}, language = {eng}, issn = {1012-0394}, journal = {Solid State Phenomena}, title = {Homogeneous and heterogeneous nucleation of oxygen in Si-CZ}, volume = {Neuveden}, year = {2011} }
TY - JOUR ID - 964585 AU - Kuběna, Josef - Kuběna, Alan - Caha, Ondřej - Meduňa, Mojmír PY - 2011 TI - Homogeneous and heterogeneous nucleation of oxygen in Si-CZ JF - Solid State Phenomena VL - Neuveden IS - 178-179 SP - 495-500 EP - 495-500 PB - Trans Tech Publications SN - 10120394 KW - Interstitials KW - Nucleation KW - Precipitation KW - Silicon KW - Vacancies N2 - We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration. ER -
KUBĚNA, Josef, Alan KUBĚNA, Ondřej CAHA a Mojmír MEDUŇA. Homogeneous and heterogeneous nucleation of oxygen in Si-CZ. \textit{Solid State Phenomena}. Switzerland: Trans Tech Publications, 2011, Neuveden, 178-179, s.~495-500. ISSN~1012-0394.
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