Growth of Carbon Materials on Gold Substrate by Plasma Enhanced CVD

ŠPERKA, Jiří, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Jan SCHÄFER, Rüdiger FOEST, Annapurna PAMREDDY and Josef HAVEL. Growth of Carbon Materials on Gold Substrate by Plasma Enhanced CVD. 2012.

Basic information

Original name

Growth of Carbon Materials on Gold Substrate by Plasma Enhanced CVD

Name in Czech

Růst uhlíkových materiálů na zlatém podkladu zesílené plazmou CVD

Name (in English)

Growth of Carbon Materials on Gold Substrate by Plasma Enhanced CVD

Authors

ŠPERKA, Jiří, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Jan SCHÄFER, Rüdiger FOEST, Annapurna PAMREDDY and Josef HAVEL

Edition

2012

---

Other information

Type of outcome

Článek v odborném periodiku

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Organization unit

Faculty of Science

Keywords (in Czech)

zlato, uhlí, uhlík, nanotrubičky, PECVD, LDI

Keywords in English

gold, carbon, carbon, nanotubes, PECVD, LDI

---

Abstract

V originále

Carbon is a versatile building element of many interesting materials that have already find practical applications in the form of thin films (diamond, DLC) or potential applications in the form of nanostructures (fullerenes, carbon nanotubes, graphene). For electronics or sensors, it is important to provide a very good contact to the functional structures. Gold is the best choice taking into account its inertness, i.e. oxidation resistance. From this point of view the investigation of the growth of carbon materials on gold is important. However, the interaction of hydrogen and hydrocarbon plasmas and growing carbon material with an inert gold surface is of high interest in basic research too. Amorphous hydrocarbon films and carbon nanotubes (CNTs) were prepared on gold substrate by means of plasma enhanced chemical vapor deposition (PECVD) and thermal CVD for comparison. Thin iron film (5 nm) was used as catalyst in case of CNTs synthesis. Three types of discharges were employed for this study, namely (i) a low pressure (8 kPa) dual frequency discharge (2.45 GHz and 13.56 MHz) in the mixture of H2 and CH4; (ii) a capillary plasma jet operating at 27.12 MHz in Ar/H2/CH4 gas mixture; (iii) a microwave torch (2.45 GHz) at atmospheric pressure in Ar/H2/CH4. The low and atmospheric pressure thermal CVD proceeded in the same gas mixtures as above. The surface morphology of the deposits was investigated by a high resolution scanning electron microscopy (HRSEM) and structure profiles were observed with a help of focused ion beam ablation. Laser desorption ionization (LDI) combined with time-of-flight mass spectrometry and infrared reflection absorption spectroscopy (IRRAS) were applied to study chemical composition. A creation of rarely observed gold-related clusters was observed by LDI and related to infrared absorption peaks.

In Czech

Uhlík je univerzální stavební prvek z mnoha zajímavých materiálů, které již najít praktické uplatnění v podobě tenkých vrstev (diamant, DLC) nebo potenciální aplikace ve formě nanostruktur (fullereny, uhlíkové nanotrubice a grafenu). Pro elektroniku a senzory, je důležité poskytují velmi dobrý kontakt na funkčních struktur. Zlato je nejlepší výběr s ohledem na jeho inertnost, tj. odolnost proti oxidaci. z tohoto Z hlediska vyšetřování růstu uhlíkových materiálů na zlato je důležité. Nicméně, interakce plazmatu vodíku a uhlovodíků a rostoucí uhlíkového materiálu inertním povrchu zlata je velký zájem základní výzkum taky. Amorfní uhlovodíkové filmy a uhlíkové nanotrubky (ČNTS) byly připraveny na zlatém podkladu pomocí plazmatické chemické depozice par zvýšenou (PECVD) a tepelné CVD pro srovnání. Tenký železa filmu (5 nm) byl použit jako katalyzátoru v případě ČNTS syntézy. Tři typy výbojů bylo zaměstnáno pro tuto studii, a to (i) nízký tlak (8 kPa) dvoufrekvenční výboj (2.45 GHz a 13,56 MHz) ve směsi H2 a CH4, (ii) kapilární plazma jet provozu na 27.12 MHz v Ar/H2/CH4 směsi plynů, (iii) mikrovlnná hořák (2,45 GHz) za atmosférického tlaku v Ar/H2/CH4.nízká a atmosférický tlak tepelné CVD probíhala ve stejných směsi plynů jak je uvedeno výše.Povrchová morfologie vkladů byl vyšetřován Vysoké rozlišení skenování elektronová mikroskopie (HRSEM) a struktura profily byly pozorovány s pomocí cíleného ablace iontových svazků. Laserová desorpce ionizace (LDI) v kombinaci s time-of-flight hmotnostní spektrometrie a infračervené reflexe absorpční spektrometrie (IRRAS) byla použita ke studiu chemické složení.Vytvoření zřídka pozorovány zlata souvisejících uskupení byla pozorován LDI a vztahující se k infračervené absorpce vrcholů.

In English

Carbon is a versatile building element of many interesting materials that have already find practical applications in the form of thin films (diamond, DLC) or potential applications in the form of nanostructures (fullerenes, carbon nanotubes, graphene). For electronics or sensors, it is important to provide a very good contact to the functional structures. Gold is the best choice taking into account its inertness, i.e. oxidation resistance. From this point of view the investigation of the growth of carbon materials on gold is important. However, the interaction of hydrogen and hydrocarbon plasmas and growing carbon material with an inert gold surface is of high interest in basic research too. Amorphous hydrocarbon films and carbon nanotubes (CNTs) were prepared on gold substrate by means of plasma enhanced chemical vapor deposition (PECVD) and thermal CVD for comparison. Thin iron film (5 nm) was used as catalyst in case of CNTs synthesis. Three types of discharges were employed for this study, namely (i) a low pressure (8 kPa) dual frequency discharge (2.45 GHz and 13.56 MHz) in the mixture of H2 and CH4; (ii) a capillary plasma jet operating at 27.12 MHz in Ar/H2/CH4 gas mixture; (iii) a microwave torch (2.45 GHz) at atmospheric pressure in Ar/H2/CH4. The low and atmospheric pressure thermal CVD proceeded in the same gas mixtures as above. The surface morphology of the deposits was investigated by a high resolution scanning electron microscopy (HRSEM) and structure profiles were observed with a help of focused ion beam ablation. Laser desorption ionization (LDI) combined with time-of-flight mass spectrometry and infrared reflection absorption spectroscopy (IRRAS) were applied to study chemical composition. A creation of rarely observed gold-related clusters was observed by LDI and related to infrared absorption peaks.