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@inproceedings{977460, author = {Zelina, Peter and Kudrle, Vít and Jašek, Ondřej}, address = {Plzeň}, booktitle = {Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011}, edition = {1}, editor = {Pavel Baroch}, keywords = {flow measurement; PECVD; Prandtl-Pitot tube; Iron pentacarbonyl}, howpublished = {tištěná verze "print"}, language = {eng}, location = {Plzeň}, isbn = {978-80-261-0009-6}, pages = {87-88}, publisher = {University of West Bohemia}, title = {Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes}, year = {2011} }
TY - JOUR ID - 977460 AU - Zelina, Peter - Kudrle, Vít - Jašek, Ondřej PY - 2011 TI - Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes PB - University of West Bohemia CY - Plzeň SN - 9788026100096 KW - flow measurement KW - PECVD KW - Prandtl-Pitot tube KW - Iron pentacarbonyl N2 - In this work we present a method to measure gas flow where conventional mass flow-meters cannot be used. These are the cases when one operates with highly reactive gases, unstable substances or meets other difficulties. We successfully used Prandtl-Pitot tube for measurement of iron pentacarbonyl flow during the process of plasma synthesis of nanoparticles. ER -
ZELINA, Peter, Vít KUDRLE and Ondřej JAŠEK. Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes. In Pavel Baroch. \textit{Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011}. 1st ed. Plzeň: University of West Bohemia, 2011, p.~87-88. ISBN~978-80-261-0009-6.
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