HAZDRA, Pavel, Volodymyr KOMARNITSKYY a Vilma BURŠÍKOVÁ. Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion. Materials Science and Engineering. Lausanne: ELSEVIER SCIENCE SA, 2009, roč. 2008, 159-60, s. 342-345. ISSN 0921-5107. Dostupné z: https://dx.doi.org/10.1016/j.mseb.2008.11.038. |
Další formáty:
BibTeX
LaTeX
RIS
@article{979109, author = {Hazdra, Pavel and Komarnitskyy, Volodymyr and Buršíková, Vilma}, article_location = {Lausanne}, article_number = {159-60}, doi = {http://dx.doi.org/10.1016/j.mseb.2008.11.038}, keywords = {diffusion; hydrogenation; platinum; silicon}, language = {eng}, issn = {0921-5107}, journal = {Materials Science and Engineering}, title = {Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion}, volume = {2008}, year = {2009} }
TY - JOUR ID - 979109 AU - Hazdra, Pavel - Komarnitskyy, Volodymyr - Buršíková, Vilma PY - 2009 TI - Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion JF - Materials Science and Engineering VL - 2008 IS - 159-60 SP - 342-345 EP - 342-345 PB - ELSEVIER SCIENCE SA SN - 09215107 KW - diffusion KW - hydrogenation KW - platinum KW - silicon N2 - The paper deals with hydrogenation of platinum atoms introduced in silicon by radiation enhanced diffusion. The interaction of defects and arising deep levels are investigated by means of deep level transient spectroscopy. ER -
HAZDRA, Pavel, Volodymyr KOMARNITSKYY a Vilma BURŠÍKOVÁ. Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion. \textit{Materials Science and Engineering}. Lausanne: ELSEVIER SCIENCE SA, 2009, roč.~2008, 159-60, s.~342-345. ISSN~0921-5107. Dostupné z: https://dx.doi.org/10.1016/j.mseb.2008.11.038.
|