Výpis publikací

1998

1. Diagnostics of RF Plasma During CNx Film Deposition

   ELIÁŠ, Marek a Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s. 54-57. Part 1. ISBN 80-967454-6-8.

   Podrobněji: https://is.muni.cz/publication/205653/cs