Publication Records

2008

1. Influence of substrate material on plasma indeposition/sputtering reactor: experiment and computer simulation

   BRZOBOHATÝ, Oto, Vilma BURŠÍKOVÁ, David NEČAS, Miroslav VALTR and David TRUNEC. Influence of substrate material on plasma indeposition/sputtering reactor: experiment and computer simulation. Journal of Physics D: Applied Physics. Bristol, England: IOP Publishing Ltd., 2008, vol. 41, No 035213, p. 1-8. ISSN 0022-3727.

   More: https://is.muni.cz/publication/767517/en