Výpis publikací

2009

1. Hybrid PVD-PECVD sputtering deposition process - from properties of deposited films to process characteristics

   ELIÁŠ, Marek, Pavel SOUČEK a Petr VAŠINA. Hybrid PVD-PECVD sputtering deposition process - from properties of deposited films to process characteristics. In Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8. Brno: Brno University of Technology, 2009, s. 87-87. ISBN 978-80-214-3875-0.

   Podrobněji: https://is.muni.cz/publication/838260/cs