Výpis publikací

MARŠÍK, Přemysl, Adam URBANOWICZ, Klara VINOKUR, Yoel COHEN a Mikhail BAKLANOV. Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry. In Materials Research Society Symposium Proceedings. 1079E. Warrendale: Materials Research Society, 2008, 6 s. ISBN 978-1-60511-077-6.

ANTOŠ, Roman, Ivan OHLÍDAL, Jan MISTRÍK, K. MURAKAMI, Tomuo YAMAGUCHI, J. PIŠTORA, M. HORIE a Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry on lamellar gratings. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, roč. 244, 1-4, s. 225-229. ISSN 0169-4332.