| HOMOLA, Tomáš, Jindrřch MATOUŠEK, Veronika MEDVECKÁ, Anna ZAHORANOVÁ, Martin KORMUNDA, Dušan KOVÁČIK a Mirko ČERNÁK. Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning. Applied Surface Science. ELSEVIER (NORTH-HOLLAND), 2012, roč. 258, č. 18, s. 7135-7139. ISSN 0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2012.03.188. |
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@article{1068273,
author = {Homola, Tomáš and Matoušek, Jindrřch and Medvecká, Veronika and Zahoranová, Anna and Kormunda, Martin and Kováčik, Dušan and Černák, Mirko},
article_number = {18},
doi = {http://dx.doi.org/10.1016/j.apsusc.2012.03.188},
keywords = {Atmospheric diffuse plasma; DCSBD; Filament-free plasma; ITO surface; Cleaning; XPS},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning},
url = {http://www.sciencedirect.com/science/article/pii/S0169433212006538},
volume = {258},
year = {2012}
}
TY - JOUR
ID - 1068273
AU - Homola, Tomáš - Matoušek, Jindrřch - Medvecká, Veronika - Zahoranová, Anna - Kormunda, Martin - Kováčik, Dušan - Černák, Mirko
PY - 2012
TI - Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning
JF - Applied Surface Science
VL - 258
IS - 18
SP - 7135-7139
EP - 7135-7139
PB - ELSEVIER (NORTH-HOLLAND)
SN - 01694332
KW - Atmospheric diffuse plasma
KW - DCSBD
KW - Filament-free plasma
KW - ITO surface
KW - Cleaning
KW - XPS
UR - http://www.sciencedirect.com/science/article/pii/S0169433212006538
L2 - http://www.sciencedirect.com/science/article/pii/S0169433212006538
N2 - Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology. (C) 2012 Elsevier B.V. All rights reserved.
ER -
HOMOLA, Tomáš, Jindrřch MATOUŠEK, Veronika MEDVECKÁ, Anna ZAHORANOVÁ, Martin KORMUNDA, Dušan KOVÁČIK a Mirko ČERNÁK. Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning. \textit{Applied Surface Science}. ELSEVIER (NORTH-HOLLAND), 2012, roč.~258, č.~18, s.~7135-7139. ISSN~0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2012.03.188.
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