Atmospheric pressure diffuse plasma in ambient air for ITO
surface cleaning

J 2012

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

HOMOLA, Tomáš, Jindrřch MATOUŠEK, Veronika MEDVECKÁ, Anna ZAHORANOVÁ, Martin KORMUNDA et. al.

Základní údaje

Originální název

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Autoři

HOMOLA, Tomáš (703 Slovensko, garant), Jindrřch MATOUŠEK (203 Česká republika), Veronika MEDVECKÁ (703 Slovensko), Anna ZAHORANOVÁ (703 Slovensko, domácí), Martin KORMUNDA (203 Česká republika), Dušan KOVÁČIK (703 Slovensko, domácí) a Mirko ČERNÁK (703 Slovensko, domácí)

Vydání

Applied Surface Science, ELSEVIER (NORTH-HOLLAND), 2012, 0169-4332

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Nizozemské království

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.112

Kód RIV

RIV/00216224:14310/12:00061236

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.apsusc.2012.03.188

UT WoS

000304004100064

Klíčová slova anglicky

Atmospheric diffuse plasma; DCSBD; Filament-free plasma; ITO surface; Cleaning; XPS

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 4. 2013 13:28, Ing. Andrea Mikešková

Anotace

V originále

Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology. (C) 2012 Elsevier B.V. All rights reserved.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

HOMOLA, Tomáš, Jindrřch MATOUŠEK, Veronika MEDVECKÁ, Anna ZAHORANOVÁ, Martin KORMUNDA, Dušan KOVÁČIK a Mirko ČERNÁK. Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning. Applied Surface Science. ELSEVIER (NORTH-HOLLAND), 2012, roč. 258, č. 18, s. 7135-7139. ISSN 0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2012.03.188.

@article{1068273,
   author = {Homola, Tomáš and Matoušek, Jindrřch and Medvecká, Veronika and Zahoranová, Anna and Kormunda, Martin and Kováčik, Dušan and Černák, Mirko},
   article_number = {18},
   doi = {http://dx.doi.org/10.1016/j.apsusc.2012.03.188},
   keywords = {Atmospheric diffuse plasma; DCSBD; Filament-free plasma; ITO surface; Cleaning; XPS},
   language = {eng},
   issn = {0169-4332},
   journal = {Applied Surface Science},
   title = {Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning},
   url = {http://www.sciencedirect.com/science/article/pii/S0169433212006538},
   volume = {258},
   year = {2012}
}

TY  - JOUR
ID  - 1068273
AU  - Homola, Tomáš - Matoušek, Jindrřch - Medvecká, Veronika - Zahoranová, Anna - Kormunda, Martin - Kováčik, Dušan - Černák, Mirko
PY  - 2012
TI  - Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning
JF  - Applied Surface Science
VL  - 258
IS  - 18
SP  - 7135-7139
EP  - 7135-7139
PB  - ELSEVIER (NORTH-HOLLAND)
SN  - 01694332
KW  - Atmospheric diffuse plasma
KW  - DCSBD
KW  - Filament-free plasma
KW  - ITO surface
KW  - Cleaning
KW  - XPS
UR  - http://www.sciencedirect.com/science/article/pii/S0169433212006538
L2  - http://www.sciencedirect.com/science/article/pii/S0169433212006538
N2  - Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology. (C) 2012 Elsevier B.V. All rights reserved.
ER  -

HOMOLA, Tomáš, Jindrřch MATOUŠEK, Veronika MEDVECKÁ, Anna ZAHORANOVÁ, Martin KORMUNDA, Dušan KOVÁČIK a Mirko ČERNÁK. Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning. \textit{Applied Surface Science}. ELSEVIER (NORTH-HOLLAND), 2012, roč.~258, č.~18, s.~7135-7139. ISSN~0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2012.03.188.

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