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@proceedings{1069206, author = {Schmidtová, Tereza and Souček, Pavel and Vašina, Petr}, booktitle = {Thirteenth International Conference on Plasma Surface Engineering}, keywords = {hybrid PVD-PECVD; magnetron sputtering; diagnostics}, language = {eng}, title = {Experimental study of DC driven hybrid PVD-PECVD process}, year = {2012} }
TY - CONF ID - 1069206 AU - Schmidtová, Tereza - Souček, Pavel - Vašina, Petr PY - 2012 TI - Experimental study of DC driven hybrid PVD-PECVD process KW - hybrid PVD-PECVD KW - magnetron sputtering KW - diagnostics N2 - Evolution of basic deposition plasma parameters such as discharge voltage and current, total pressure and selected spectral emission line intensities as a function of acetylene supply flow is reported and correlated with the evolution of the state of the target. ER -
SCHMIDTOVÁ, Tereza, Pavel SOUČEK a Petr VAŠINA. Experimental study of DC driven hybrid PVD-PECVD process. In \textit{Thirteenth International Conference on Plasma Surface Engineering}. 2012.
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