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@inproceedings{1069213, author = {Vašina, Petr and Schmidtová, Tereza and Souček, Pavel and Buršíková, Vilma}, address = {Trenčín}, booktitle = {Vrstvy a povlaky 2010: Zborník prednášok}, keywords = {hybrid PVD-PECVD; magnetron sputtering}, howpublished = {tištěná verze "print"}, language = {eng}, location = {Trenčín}, isbn = {978-80-970824-1-3}, pages = {133-134}, publisher = {Miloš Vavrík - Knihvazačstvo Trenčín}, title = {Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition}, year = {2012} }
TY - JOUR ID - 1069213 AU - Vašina, Petr - Schmidtová, Tereza - Souček, Pavel - Buršíková, Vilma PY - 2012 TI - Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition PB - Miloš Vavrík - Knihvazačstvo Trenčín CY - Trenčín SN - 9788097082413 KW - hybrid PVD-PECVD KW - magnetron sputtering N2 - This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition ER -
VAŠINA, Petr, Tereza SCHMIDTOVÁ, Pavel SOUČEK a Vilma BURŠÍKOVÁ. Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition. In \textit{Vrstvy a povlaky 2010: Zborník prednášok}. Trenčín: Miloš Vavrík - Knihvazačstvo Trenčín, 2012, s.~133-134. ISBN~978-80-970824-1-3.
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