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@inproceedings{1070409,
author = {Obrusník, Adam and Bonaventura, Zdeněk and Potocký, Štěpán and Kromka, Alexander},
address = {Lisboa},
booktitle = {XXI Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases Proceedings},
editor = {P. G. C. Almerida, L. L. Alves, V. Guerra},
keywords = {finite element method, simulation, plasma, NCD, microwave plasma, hydrogen plasma},
language = {eng},
location = {Lisboa},
isbn = {2-914771-74-6},
publisher = {European Physical Society},
title = {Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films},
year = {2012}
}
TY - JOUR
ID - 1070409
AU - Obrusník, Adam - Bonaventura, Zdeněk - Potocký, Štěpán - Kromka, Alexander
PY - 2012
TI - Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films
PB - European Physical Society
CY - Lisboa
SN - 2914771746
KW - finite element method, simulation, plasma, NCD, microwave plasma, hydrogen plasma
ER -
OBRUSNÍK, Adam, Zdeněk BONAVENTURA, Štěpán POTOCKÝ a Alexander KROMKA. Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films. In P. G. C. Almerida, L. L. Alves, V. Guerra. \textit{XXI Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases Proceedings}. Lisboa: European Physical Society, 2012, 2 s. ISBN~2-914771-74-6.
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