2012
Analysis of electron current instability in e-beam writer
BOK, Jan; Miroslav HORÁČEK; Stanislav KRÁL; Vladimír KOLAŘÍK; František MATĚJKA et al.Základní údaje
Originální název
Analysis of electron current instability in e-beam writer
Autoři
BOK, Jan; Miroslav HORÁČEK; Stanislav KRÁL; Vladimír KOLAŘÍK a František MATĚJKA
Vydání
NANOCON 2012 Conference proceedings, od s. 295-299, 2012
Nakladatel
TANGER
Další údaje
Typ výsledku
Stať ve sborníku
Utajení
není předmětem státního či obchodního tajemství
Odkazy
Označené pro přenos do RIV
Ne
UT WoS
Klíčová slova anglicky
Electron beam, current measurement, current drift and noise, Fourier analysis
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 13. 2. 2013 10:42, Mgr. Jan Bok, Ph.D.
Anotace
V originále
The electron beam writer Tesla BS600 works with a thermal-field electron emitter, fixed electron energy of 15 keV and a rectangular shaped variable-size electron beam. The size of the shaped beam (stamp) can be set from 50 to 6300 nm in standard mode and from 16 to 2100 nm in high-resolution mode. The basic increment of the stamp size is 50 nm, resp. 16 nm. Electron current density inhomogeneity and long-term instability in stamps can have negative impact on the exposure quality. Therefore, we focused on a study of the current time instability. The current density in variously sized stamps was measured by a picoammeter and a PIN diode video channel as a function of time. We analyzed short-term and long-term current instabilities using filtering techniques, as well as the Fourier analysis. Based on the results, we could be able to find reasons of the current instabilities and to propose improvements to achieve higher exposure quality.