Study of spatial resolution of YAG:Ce cathodoluminescent
imaging screens

J 2013

Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens

SCHAUER, Petr a Jan BOK

Základní údaje

Originální název

Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens

Autoři

SCHAUER, Petr a Jan BOK

Vydání

Nuclear Instruments and Methods in Physics Research Section B, ELSEVIER (NORTH-HOLLAND), 2013, 0168-583X

Další údaje

Typ výsledku

Článek v odborném periodiku

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.186

Označené pro přenos do RIV

DOI

https://doi.org/10.1016/j.nimb.2013.05.006

UT WoS

000321484400013

Klíčová slova anglicky

Spatial resolution; Imaging screen; Electron microscope; Cathodoluminescence; YAG:Ce single crystal; Line spread function; Modulation transfer function

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 10. 6. 2013 14:47, Mgr. Jan Bok, Ph.D.

Anotace

V originále

The aim of this paper is to find spatial resolution of YAG:Ce single crystal cathodoluminescent imaging screens at primary electron energies in the range from 20 to 100 keV using theoretical simulation as well as the experimental method. Calculations have been based on the MC model for energy distribution of excited electrons. Measurement of the spatial resolution was realized using the sharp edge projection method. As the projection object, the silicon single crystal plate with the hole made by the anisotropic etching was prepared and used. The edge of this object was examined at the magnification of up to 125,000x. For the edge projection method, the experimental system with the screen specimen cartridge and with the light-microscopic module using the magnifying objective and the CCD camera has been constructed and used. The simulated as well as experimental results have been processed and are presented in the form of line spread function (LSF). The resulted image qualities were quantified using modulation transfer function (MTF). Finally, the spatial resolutions of YAG:Ce single crystal imaging screens were determined as the number of lines per mm for the contrast of 50% and primary electron beam energies of 20, 60 and 100 keV.

Citovat

SCHAUER, Petr a Jan BOK. Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens. Nuclear Instruments and Methods in Physics Research Section B. ELSEVIER (NORTH-HOLLAND), 2013, roč. 308, s. 68–73. ISSN 0168-583X. Dostupné z: https://doi.org/10.1016/j.nimb.2013.05.006.

@article{1110932,
   author = {Schauer, Petr and Bok, Jan},
   doi = {https://doi.org/10.1016/j.nimb.2013.05.006},
   keywords = {Spatial resolution; Imaging screen; Electron microscope; Cathodoluminescence; YAG:Ce single crystal; Line spread function; Modulation transfer function},
   issn = {0168-583X},
   journal = {Nuclear Instruments and Methods in Physics Research Section B},
   title = {Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens},
   url = {http://www.sciencedirect.com/science/article/pii/S0168583X1300503X},
   volume = {308},
   year = {2013}
}

TY  - JOUR
ID  - 1110932
AU  - Schauer, Petr - Bok, Jan
PY  - 2013
TI  - Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens
JF  - Nuclear Instruments and Methods in Physics Research Section B
VL  - 308
SP  - 68–73
EP  - 68–73
PB  - ELSEVIER (NORTH-HOLLAND)
SN  - 0168583X
KW  - Spatial resolution
KW  - Imaging screen
KW  - Electron microscope
KW  - Cathodoluminescence
KW  - YAG:Ce single crystal
KW  - Line spread function
KW  - Modulation transfer function
UR  - http://www.sciencedirect.com/science/article/pii/S0168583X1300503X
N2  - The aim of this paper is to find spatial resolution of YAG:Ce single crystal cathodoluminescent imaging screens at primary electron energies in the range from 20 to 100 keV using theoretical simulation as well as the experimental method. Calculations have been based on the MC model for energy distribution of excited electrons. Measurement of the spatial resolution was realized using the sharp edge projection method. As the projection object, the silicon single crystal plate with the hole made by the anisotropic etching was prepared and used. The edge of this object was examined at the magnification of up to 125,000x. For the edge projection method, the experimental system with the screen specimen cartridge and with the light-microscopic module using the magnifying objective and the CCD camera has been constructed and used. The simulated as well as experimental results have been processed and are presented in the form of line spread function (LSF). The resulted image qualities were quantified using modulation transfer function (MTF). Finally, the spatial resolutions of YAG:Ce single crystal imaging screens were determined as the number of lines per mm for the contrast of 50% and primary electron beam energies of 20, 60 and 100 keV.
ER  -

SCHAUER, Petr a Jan BOK. Study of spatial resolution of YAG:Ce cathodoluminescent imaging screens. \textit{Nuclear Instruments and Methods in Physics Research Section B}. ELSEVIER (NORTH-HOLLAND), 2013, roč.~308, s.~68–73. ISSN~0168-583X. Dostupné z: https://doi.org/10.1016/j.nimb.2013.05.006.

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