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@proceedings{1121041, author = {Galmiz, Oleksandr and Brablec, Antonín and Kersten, Holger}, booktitle = {5th Central European Symposium on Plasma Chemistry}, keywords = {Atmospheric pressure plasma jet; deposition; zn-containing film.}, language = {eng}, isbn = {978-615-5270-04-8}, title = {Deposition of Zn-containing films}, year = {2013} }
TY - CONF ID - 1121041 AU - Galmiz, Oleksandr - Brablec, Antonín - Kersten, Holger PY - 2013 TI - Deposition of Zn-containing films SN - 9786155270048 KW - Atmospheric pressure plasma jet KW - deposition KW - zn-containing film. N2 - The aim of this work was depositing Zn-containing films using the atmospheric pressure plasma jet “kINPen’09”. In our work preliminary experiments of Zn deposition on the Si substrate in water solutions were done. Solutions of Zn(NO3)2 * 6H2O salt in water were used. A “white” colored film was achieved after the 30 s of treatment time. The deposited film profiles were obtained with the help of profilometer. The variation of the initial solution concentration and the deposition time lead to deposition of films with different film thicknesses. ER -
GALMIZ, Oleksandr, Antonín BRABLEC a Holger KERSTEN. Deposition of Zn-containing films. In \textit{5th Central European Symposium on Plasma Chemistry}. 2013. ISBN~978-615-5270-04-8.
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