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@inproceedings{1122758,
author = {Klein, Peter and Vašina, Petr and Schmidtová, Tereza},
address = {Liberec},
booktitle = {PAPN 2013: Book of extended abstracts},
edition = {1st},
editor = {Ing. Adam Pazourek, PhD, Ing. Zuzana Andršová},
keywords = {Sputtering; Magnetron; Monte Carlo simulation; Compound material},
howpublished = {paměťový nosič},
language = {eng},
location = {Liberec},
isbn = {978-80-7372-988-2},
pages = {26-29},
publisher = {Technical University of Liberec},
title = {On sputtered particle distribution towards substrate during target erosion - simulation and experiment},
year = {2013}
}
TY - JOUR
ID - 1122758
AU - Klein, Peter - Vašina, Petr - Schmidtová, Tereza
PY - 2013
TI - On sputtered particle distribution towards substrate during target erosion - simulation and experiment
PB - Technical University of Liberec
CY - Liberec
SN - 9788073729882
KW - Sputtering
KW - Magnetron
KW - Monte Carlo simulation
KW - Compound material
N2 - It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated.
ER -
KLEIN, Peter, Petr VAŠINA a Tereza SCHMIDTOVÁ. On sputtered particle distribution towards substrate during target erosion - simulation and experiment. In Ing. Adam Pazourek, PhD, Ing. Zuzana Andršová. \textit{PAPN 2013: Book of extended abstracts}. 1st. Liberec: Technical University of Liberec. s.~26-29, 3 s. ISBN~978-80-7372-988-2. 2013.
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