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@inproceedings{1122853,
author = {Fekete, Matej and Vašina, Petr and Klein, Peter},
address = {Liberec},
booktitle = {PAPN 2013: Book of extended abstracts},
editor = {Adam Pazourek, Zuzana Andršová},
keywords = {HiPIMS; discharge current; magnetron sputtering; optical emission spectroscopy},
howpublished = {paměťový nosič},
language = {eng},
location = {Liberec},
isbn = {978-80-7372-988-2},
pages = {17-18},
publisher = {Technical University of Liberec},
title = {Evolution of discharge current in high power impulse magnetron sputtering},
year = {2013}
}
TY - JOUR
ID - 1122853
AU - Fekete, Matej - Vašina, Petr - Klein, Peter
PY - 2013
TI - Evolution of discharge current in high power impulse magnetron sputtering
PB - Technical University of Liberec
CY - Liberec
SN - 9788073729882
KW - HiPIMS
KW - discharge current
KW - magnetron sputtering
KW - optical emission spectroscopy
N2 - High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented.
ER -
FEKETE, Matej, Petr VAŠINA a Peter KLEIN. Evolution of discharge current in high power impulse magnetron sputtering. In Adam Pazourek, Zuzana Andršová. \textit{PAPN 2013: Book of extended abstracts}. Liberec: Technical University of Liberec. s.~17-18. ISBN~978-80-7372-988-2. 2013.
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