Determination of sputtered species densities in HIPIMS
discharge by optical emission spectroscopy

a 2014

Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

FEKETE, Matej; Petr VAŠINA; Peter KLEIN; Lenka DOSOUDILOVÁ; Zdeněk NAVRÁTIL et al.

Základní údaje

Originální název

Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

Autoři

FEKETE, Matej; Petr VAŠINA; Peter KLEIN; Lenka DOSOUDILOVÁ; Zdeněk NAVRÁTIL; Jaroslav HNILICA a Pavel DVOŘÁK

Vydání

Fifth International Conference on HIPIMS, 2014

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/14:00073767

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

HIPIMS;OES;density

Příznaky

Mezinárodní význam

Změněno: 31. 7. 2014 10:54, Mgr. Matej Fekete, Ph.D.

Anotace

V originále

Developing of magnetron sputtering process is aiming mainly to increase ionization of sputtered particles, to improve target yield or to enhance deposition rate. HIPIMS discharge yields higher number density of ionized sputtered species than DC case. However, it is difficult to estimate absolute number densities of the sputtered species (atoms and ions) in ground and metastable states from optical emission spectroscopy, because the ground and metastable levels do not directly produce any optical signal. There has been developed variety of indirect methods, however, mainly for rare gases to obtain information about number densities of metastable levels. Our research aim is to adapt these techniques such as self-absorption or effective branching fraction [1] on conditions of HIPIMS discharge. We ran experiments on magnetron with 20 cm titanium target. Lines of titanium neutrals and ions which originate at same higher level and fall to certain sub-level of neutral or ion ground state were carefully selected in our research. The population of these ground state sub-levels was assumed to follow Boltzmann distribution. Fitting theoretically calculated branching rations to experimentally measured ratios of the line intensities enable us to determine number densities of ground state sputtered species from optical emission spectroscopy in a HIPIMS discharge – see estimated evolution of Ti ion number-density together with the discharge current at Fig. 1. This research has been supported by the CZ.1.05/2.1.00/03.0086 and GACR P205/12/0407 projects.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Citovat

FEKETE, Matej; Petr VAŠINA; Peter KLEIN; Lenka DOSOUDILOVÁ; Zdeněk NAVRÁTIL; Jaroslav HNILICA a Pavel DVOŘÁK. Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy. In Fifth International Conference on HIPIMS. 2014.

@proceedings{1193798,
   author = {Fekete, Matej and Vašina, Petr and Klein, Peter and Dosoudilová, Lenka and Navrátil, Zdeněk and Hnilica, Jaroslav and Dvořák, Pavel},
   booktitle = {Fifth International Conference on HIPIMS},
   keywords = {HIPIMS;OES;density},
   language = {eng},
   title = {Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy},
   year = {2014}
}

TY  - CONF
ID  - 1193798
AU  - Fekete, Matej - Vašina, Petr - Klein, Peter - Dosoudilová, Lenka - Navrátil, Zdeněk - Hnilica, Jaroslav - Dvořák, Pavel
PY  - 2014
TI  - Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy
KW  - HIPIMS;OES;density
N2  - Developing of magnetron sputtering process is aiming mainly to increase ionization of sputtered particles, to improve target yield or to enhance deposition rate. HIPIMS discharge yields higher number density of ionized sputtered species than DC case. However, it is difficult to estimate absolute number densities of the sputtered species (atoms and ions) in ground and metastable states from optical emission spectroscopy, because the ground and metastable levels do not directly produce any optical signal. There has been developed variety of indirect methods, however, mainly for rare gases to obtain information about number densities of metastable levels. Our research aim is to adapt these techniques such as self-absorption or effective branching fraction [1] on conditions of HIPIMS discharge. We ran experiments on magnetron with 20 cm titanium target. Lines of titanium neutrals and ions which originate at same higher level and fall to certain sub-level of neutral or ion ground state were carefully selected in our research. The population of these ground state sub-levels was assumed to follow Boltzmann distribution. Fitting theoretically calculated branching rations to experimentally measured ratios of the line intensities enable us to determine number densities of ground state sputtered species from optical emission spectroscopy in a HIPIMS discharge – see estimated evolution of Ti ion number-density together with the discharge current at Fig. 1. This research has been supported by the CZ.1.05/2.1.00/03.0086 and GACR P205/12/0407 projects.
ER  -

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