SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Romana MIKŠOVÁ, Y.T. PEI and J.Th.M. DE HOSSON. On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux. Surface & coatings technology. Elsevier, 2014, vol. 255, September, p. 8-14. ISSN 0257-8972. doi:10.1016/j.surfcoat.2013.11.001.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
Authors SOUČEK, Pavel (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Lukáš ZÁBRANSKÝ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution), Ondřej CAHA (203 Czech Republic, belonging to the institution), Jiří BURŠÍK (203 Czech Republic), Vratislav PEŘINA (203 Czech Republic), Romana MIKŠOVÁ (203 Czech Republic), Y.T. PEI (528 Netherlands) and J.Th.M. DE HOSSON (528 Netherlands).
Edition Surface & coatings technology, Elsevier, 2014, 0257-8972.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher Switzerland
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 1.998
RIV identification code RIV/00216224:14310/14:00073844
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1016/j.surfcoat.2013.11.001
UT WoS 000343348800003
Keywords in English nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties
Tags AKR, rivok
Changed by Changed by: doc. RNDr. Vilma Buršíková, Ph.D., učo 2418. Changed: 15/3/2018 11:01.
Abstract
Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~ 320 °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared. It is concluded that the level of the impinging ion flux in DC magnetron sputtering is not a significant factor influencing the mechanical properties of the coatings in the presented setup.
Links
ED2.1.00/03.0086, research and development projectName: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GAP205/12/0407, research and development projectName: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
Investor: Czech Science Foundation, Standard Projects
GD104/09/H080, research and development projectName: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation, Doctor grants
PrintDisplayed: 26/1/2022 21:05