On the control of deposition process for enhanced mechanical
properties of nc-TiC/a-C:H coatings with DC magnetron
sputtering at low or high ion flux

J 2014

On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA et. al.

Basic information

Original name

On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux

Authors

SOUČEK, Pavel (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Lukáš ZÁBRANSKÝ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution), Ondřej CAHA (203 Czech Republic, belonging to the institution), Jiří BURŠÍK (203 Czech Republic), Vratislav PEŘINA (203 Czech Republic), Romana MIKŠOVÁ (203 Czech Republic), Y.T. PEI (528 Netherlands) and J.Th.M. DE HOSSON (528 Netherlands)

Edition

Surface & coatings technology, Elsevier, 2014, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.998

RIV identification code

RIV/00216224:14310/14:00073844

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2013.11.001

UT WoS

000343348800003

Keywords in English

nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties

Abstract

V originále

Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~ 320 °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared. It is concluded that the level of the impinging ion flux in DC magnetron sputtering is not a significant factor influencing the mechanical properties of the coatings in the presented setup.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, research and development project

Name: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Czech Science Foundation

GD104/09/H080, research and development project

Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

Citovat

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Romana MIKŠOVÁ, Y.T. PEI and J.Th.M. DE HOSSON. On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux. Surface & coatings technology. Elsevier, 2014, vol. 255, September, p. 8-14. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2013.11.001.

@article{1197208,
   author = {Souček, Pavel and Schmidtová, Tereza and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr and Caha, Ondřej and Buršík, Jiří and Peřina, Vratislav and Mikšová, Romana and Pei, Y.T. and De Hosson, J.Th.M.},
   article_number = {September},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2013.11.001},
   keywords = {nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897213010141},
   volume = {255},
   year = {2014}
}

TY  - JOUR
ID  - 1197208
AU  - Souček, Pavel - Schmidtová, Tereza - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr - Caha, Ondřej - Buršík, Jiří - Peřina, Vratislav - Mikšová, Romana - Pei, Y.T. - De Hosson, J.Th.M.
PY  - 2014
TI  - On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
JF  - Surface & coatings technology
VL  - 255
IS  - September
SP  - 8-14
EP  - 8-14
PB  - Elsevier
SN  - 02578972
KW  - nanocomposite
KW  - magnetron sputtering
KW  - ion flux on the substrate
KW  - titanium carbide
KW  - enhanced mechanical properties
UR  - http://www.sciencedirect.com/science/article/pii/S0257897213010141
N2  - Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~ 320 °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared. It is concluded that the level of the impinging ion flux in DC magnetron sputtering is not a significant factor influencing the mechanical properties of the coatings in the presented setup.
ER  -

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Romana MIKŠOVÁ, Y.T. PEI and J.Th.M. DE HOSSON. On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux. \textit{Surface \&{} coatings technology}. Elsevier, 2014, vol.~255, September, p.~8-14. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2013.11.001.

Detailed Information on Publication Record