On the control of deposition process for enhanced mechanical
properties of nc-TiC/a-C:H coatings with DC magnetron
sputtering at low or high ion flux

J 2014

On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA et. al.

Základní údaje

Originální název

On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux

Autoři

SOUČEK, Pavel (203 Česká republika, domácí), Tereza SCHMIDTOVÁ (203 Česká republika, domácí), Lukáš ZÁBRANSKÝ (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Petr VAŠINA (203 Česká republika, garant, domácí), Ondřej CAHA (203 Česká republika, domácí), Jiří BURŠÍK (203 Česká republika), Vratislav PEŘINA (203 Česká republika), Romana MIKŠOVÁ (203 Česká republika), Y.T. PEI (528 Nizozemské království) a J.Th.M. DE HOSSON (528 Nizozemské království)

Vydání

Surface & coatings technology, Elsevier, 2014, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.998

Kód RIV

RIV/00216224:14310/14:00073844

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.surfcoat.2013.11.001

UT WoS

000343348800003

Klíčová slova anglicky

nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 7. 2024 09:45, Mgr. Marie Šípková, DiS.

Anotace

V originále

Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~ 320 °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared. It is concluded that the level of the impinging ion flux in DC magnetron sputtering is not a significant factor influencing the mechanical properties of the coatings in the presented setup.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

GD104/09/H080, projekt VaV

Název: Plazmochemické procesy a jejich technologické aplikace

Investor: Grantová agentura ČR, Plazmochemické procesy a jejich technologické aplikace

Citovat

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Romana MIKŠOVÁ, Y.T. PEI a J.Th.M. DE HOSSON. On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux. Surface & coatings technology. Elsevier, 2014, roč. 255, September, s. 8-14. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2013.11.001.

@article{1197208,
   author = {Souček, Pavel and Schmidtová, Tereza and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr and Caha, Ondřej and Buršík, Jiří and Peřina, Vratislav and Mikšová, Romana and Pei, Y.T. and De Hosson, J.Th.M.},
   article_number = {September},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2013.11.001},
   keywords = {nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897213010141},
   volume = {255},
   year = {2014}
}

TY  - JOUR
ID  - 1197208
AU  - Souček, Pavel - Schmidtová, Tereza - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr - Caha, Ondřej - Buršík, Jiří - Peřina, Vratislav - Mikšová, Romana - Pei, Y.T. - De Hosson, J.Th.M.
PY  - 2014
TI  - On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
JF  - Surface & coatings technology
VL  - 255
IS  - September
SP  - 8-14
EP  - 8-14
PB  - Elsevier
SN  - 02578972
KW  - nanocomposite
KW  - magnetron sputtering
KW  - ion flux on the substrate
KW  - titanium carbide
KW  - enhanced mechanical properties
UR  - http://www.sciencedirect.com/science/article/pii/S0257897213010141
N2  - Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~ 320 °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared. It is concluded that the level of the impinging ion flux in DC magnetron sputtering is not a significant factor influencing the mechanical properties of the coatings in the presented setup.
ER  -

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK, Vratislav PEŘINA, Romana MIKŠOVÁ, Y.T. PEI a J.Th.M. DE HOSSON. On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux. \textit{Surface \&{} coatings technology}. Elsevier, 2014, roč.~255, September, s.~8-14. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2013.11.001.

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