Titanium carbide/carbon nanocomposite hard coatings: A
comparative study between various chemical analysis tools

J 2014

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER et. al.

Základní údaje

Originální název

Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools

Autoři

EL MEL, A.A. (250 Francie), E. GAUTRON (250 Francie), F. CHRISTIEN (250 Francie), B. ANGLERAUD (250 Francie), A. GRANIER (250 Francie), Pavel SOUČEK (203 Česká republika, domácí), Petr VAŠINA (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), M. TAKASHIMA (392 Japonsko), N. OHTAKE (392 Japonsko), H. AKASAKA (392 Japonsko), T. SUZUKI (392 Japonsko) a P.Y. TESSIER (250 Francie, garant)

Vydání

Surface & coatings technology, Elsevier, 2014, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.998

Kód RIV

RIV/00216224:14310/14:00073845

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.surfcoat.2013.12.068

UT WoS

000343349600008

Klíčová slova anglicky

nanocomposite thin film; carbon; XPS; WDS; EDS; RBS

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 7. 2024 09:44, Mgr. Marie Šípková, DiS.

Anotace

V originále

Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium. In case of EDS, the underestimation is related to the poor sensitivity of the used probe in regard to light elements such as carbon. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that the size of the TiC nanoparticles shrinks when increasing the carbon content within the films. We further demonstrate that this structural evolution has a direct impact on the hardness of the coatings which gets reduced when the grain size decreases.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, projekt VaV

Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Citovat

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER, Pavel SOUČEK, Petr VAŠINA, Vilma BURŠÍKOVÁ, M. TAKASHIMA, N. OHTAKE, H. AKASAKA, T. SUZUKI a P.Y. TESSIER. Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools. Surface & coatings technology. Elsevier, 2014, roč. 256, October, s. 41-46. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2013.12.068.

@article{1197209,
   author = {El Mel, A.A. and Gautron, E. and Christien, F. and Angleraud, B. and Granier, A. and Souček, Pavel and Vašina, Petr and Buršíková, Vilma and Takashima, M. and Ohtake, N. and Akasaka, H. and Suzuki, T. and Tessier, P.Y.},
   article_number = {October},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2013.12.068},
   keywords = {nanocomposite thin film; carbon; XPS; WDS; EDS; RBS},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897213012231},
   volume = {256},
   year = {2014}
}

TY  - JOUR
ID  - 1197209
AU  - El Mel, A.A. - Gautron, E. - Christien, F. - Angleraud, B. - Granier, A. - Souček, Pavel - Vašina, Petr - Buršíková, Vilma - Takashima, M. - Ohtake, N. - Akasaka, H. - Suzuki, T. - Tessier, P.Y.
PY  - 2014
TI  - Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
JF  - Surface & coatings technology
VL  - 256
IS  - October
SP  - 41-46
EP  - 41-46
PB  - Elsevier
SN  - 02578972
KW  - nanocomposite thin film
KW  - carbon
KW  - XPS
KW  - WDS
KW  - EDS
KW  - RBS
UR  - http://www.sciencedirect.com/science/article/pii/S0257897213012231
N2  - Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium. In case of EDS, the underestimation is related to the poor sensitivity of the used probe in regard to light elements such as carbon. Moreover, the structure of the coatings has been extensively probed by transmission electron microscopy, which has shown that the size of the TiC nanoparticles shrinks when increasing the carbon content within the films. We further demonstrate that this structural evolution has a direct impact on the hardness of the coatings which gets reduced when the grain size decreases.
ER  -

EL MEL, A.A., E. GAUTRON, F. CHRISTIEN, B. ANGLERAUD, A. GRANIER, Pavel SOUČEK, Petr VAŠINA, Vilma BURŠÍKOVÁ, M. TAKASHIMA, N. OHTAKE, H. AKASAKA, T. SUZUKI a P.Y. TESSIER. Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools. \textit{Surface \&{} coatings technology}. Elsevier, 2014, roč.~256, October, s.~41-46. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2013.12.068.

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