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@proceedings{1202707, author = {Skácelová, Dana and Čech, Jan and Černák, Mirko}, booktitle = {HAKONE XIV, 2014 Zinnowitz Germany, Book of Abstracts}, keywords = {interaction; plasma; surface; barrier discharge;coplanar; DCSBD; Silicon}, language = {eng}, title = {PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON}, year = {2014} }
TY - CONF ID - 1202707 AU - Skácelová, Dana - Čech, Jan - Černák, Mirko PY - 2014 TI - PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON KW - interaction KW - plasma KW - surface KW - barrier discharge;coplanar KW - DCSBD KW - Silicon N2 - The aim of this work is to study the characterization of plasma-surface interaction of silicon in DCSBD plasma. The influence of the plasma, generated in ambient air on the silicon surface properties with respect to the filamentary nature of DCSBD was studied. Surface properties and chemical composition of silicon were studied by SEM and EDX, respectively. The experimental data were successfully supported by the modeling. ER -
SKÁCELOVÁ, Dana, Jan ČECH a Mirko ČERNÁK. PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON. In \textit{HAKONE XIV, 2014 Zinnowitz Germany, Book of Abstracts}. 2014.
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