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@proceedings{1309234, author = {Klein, Peter and Hnilica, Jaroslav and Hubička, Zdeněk and Čada, Martin and Vašina, Petr}, booktitle = {22nd International Symposium on Plasma Chemistry}, keywords = {HiPIMS; spokes; magnetron sputtering; plasma instabilities}, language = {eng}, title = {Spoke induced cathode voltage and discharge current oscillations in HiPIMS}, url = {http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf}, year = {2015} }
TY - CONF ID - 1309234 AU - Klein, Peter - Hnilica, Jaroslav - Hubička, Zdeněk - Čada, Martin - Vašina, Petr PY - 2015 TI - Spoke induced cathode voltage and discharge current oscillations in HiPIMS KW - HiPIMS KW - spokes KW - magnetron sputtering KW - plasma instabilities UR - http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf L2 - http://www.ispc-conference.org/ispcproc/ispc22/P-I-1-5.pdf N2 - The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges. ER -
KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA a Petr VAŠINA. Spoke induced cathode voltage and discharge current oscillations in HiPIMS. In \textit{22nd International Symposium on Plasma Chemistry}. 2015.
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