a 2015

COMPARISON OF STRUCTURE AND MECHANICAL PROPERTIES OF nc-TiC/a-C(:H) AND nc-(Ti,Ni)C/a-C(:H) COATINGS

DANIEL, Josef; Lukáš ZÁBRANSKÝ; Pavel SOUČEK; Monika STUPAVSKÁ; Jaroslav HNILICA et al.

Základní údaje

Originální název

COMPARISON OF STRUCTURE AND MECHANICAL PROPERTIES OF nc-TiC/a-C(:H) AND nc-(Ti,Ni)C/a-C(:H) COATINGS

Vydání

ITFPC15, 2015

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Francie

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/15:00081224

Organizační jednotka

Přírodovědecká fakulta

ISSN

Klíčová slova anglicky

magnetron sputtering; thin coatings; nickel; titanium carbide; nanocomposite

Příznaky

Mezinárodní význam
Změněno: 23. 11. 2015 14:44, Mgr. Josef Daniel, Ph.D.

Anotace

V originále

Nanocomposite coatings composed of nanocrystalline grains of titanium carbide embedded in an amorphous carbon matrix, nc-TiC/a-C(:H), are widely studied due to their mechanical properties such as high hardness [1]. One of the main parameters that determines the final mechanical properties of nc-TiC/a-C(:H) coating system is the relative content of nanocrystalline and amorphous phase. Selective doping of this system by a non-carbide forming element such as nickel is a possible tool for influencing this parameter [2]. Hybrid PVD-PECVD process of titanium target sputtering in a mixture of acetylene and argon was used to deposit nc-TiC/a-C(:H) coatings [3]. Titanium-nickel (92.5 % Ti, 7.5 % Ni) target was used for preparation of nickel doped coatings. Varying acetylene flow rate was used in order to prepare coatings with different content of C in coatings. Several sets of Ni-free nc-TiC/a-C(:H) and Ni-dopped nc-TiC/a-C(:H) coatings were prepared and compared. Several different analyses were used for the determination of the influence of nickel doping on the properties of the deposited coatings. Composition of coatings was determined using EDX technique, the size of TiC grains and the lattice parameter was determined by grazing angle of incidence X-ray diffraction (GIXRD). Coatings were furthermore analyzed by X-ray photoelectron spectroscopy and Raman spectroscopy to determine and also to quantify the present bonds. Fischerscope H100 depth sensing indenter equipped with a Berkovich tip was used for evaluation of hardness of the coatings. Optical emission spectroscopy was used for analysis of properties of plasma during deposition process. There are only peaks corresponding to TiC and no peaks corresponding to Ni in the XRD difractograms. This suggests that that nickel atoms are bonded only in the TiC grains forming (Ti,Ni)C grains, as was proposed by Lewin [2]. The sizes of the TiC and (Ti,Ni)C grains as well as the lattice parameters obtained from XRD analysis exhibit almost no dependence on nickel content of the coatings in the studied range, although difference between the hardness of nickel-free and nickel-doped sets of coatings was observed. This research has been supported by the project CZ.1.05/2.1.00/03.0086 funded by European Regional Development Fund, project LO1411 (NPU I) funded by Ministry of Education, Youth and Sports of Czech Republic and GACR P205/12/0407 project.

Návaznosti

ED2.1.00/03.0086, projekt VaV
Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GAP205/12/0407, projekt VaV
Název: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
Investor: Grantová agentura ČR, Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
LO1411, projekt VaV
Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)
Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy