Mechanical properties of atomic layer deposited Al2O3/ZnO
nanolaminates

J 2015

Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates

HOMOLA, Tomáš; Vilma BURŠÍKOVÁ; Tatiana IVANOVA; Pavel SOUČEK; Philipp MAYDANNIK et al.

Základní údaje

Originální název

Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates

Autoři

HOMOLA, Tomáš; Vilma BURŠÍKOVÁ; Tatiana IVANOVA; Pavel SOUČEK; Philipp MAYDANNIK; David Campbell CAMERON a Jürgen LACKNER

Vydání

Surface & Coatings Technology, 2015, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.139

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/15:00085284

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Nanolaminates;Multilayer;ALD;Hardness;Mechanical Properties;Zinc Oxide; Aluminium Oxide

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 7. 2024 09:38, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Nanoscale structures of aluminium oxide (Al2O3) and zinc oxide (ZnO) multilayers (nanolaminates) were prepared by atomic layer deposition (ALD) on silicon substrates at 120 °C. The focus of this work was to study the effects of bilayer period on mechanical properties and the effect of the ratio between the thicknesses of each material with bilayer period kept constant. We found that reduction of bilayer period led to an increase in hardness of the nanolaminates, which was explained by the Hall–Petch effect. The influence on hardness of the thickness ratio between Al2O3 and ZnO, where it increased by 50% for Al2O3/ZnO = 1:24 with bilayer period = 25 nm was observed. Progressive scratch tests revealed that the highest critical load for delamination and the highest toughness was observed for samples with Al2O3/ZnO = 24:1 with bilayer period = 25 nm.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

EE2.3.30.0009, projekt VaV

Název: Zaměstnáním čerstvých absolventů doktorského studia k vědecké excelenci

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

HOMOLA, Tomáš; Vilma BURŠÍKOVÁ; Tatiana IVANOVA; Pavel SOUČEK; Philipp MAYDANNIK; David Campbell CAMERON a Jürgen LACKNER. Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates. Surface & Coatings Technology. 2015, roč. 284, December, s. 198-205. ISSN 0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2015.07.078.

@article{1321632,
   author = {Homola, Tomáš and Buršíková, Vilma and Ivanova, Tatiana and Souček, Pavel and Maydannik, Philipp and Cameron, David Campbell and Lackner, Jürgen},
   article_number = {December},
   doi = {https://doi.org/10.1016/j.surfcoat.2015.07.078},
   keywords = {Nanolaminates;Multilayer;ALD;Hardness;Mechanical Properties;Zinc Oxide; Aluminium Oxide},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & Coatings Technology},
   title = {Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates},
   url = {http://www.sciencedirect.com/science/article/pii/S0257897215004922},
   volume = {284},
   year = {2015}
}

TY  - JOUR
ID  - 1321632
AU  - Homola, Tomáš - Buršíková, Vilma - Ivanova, Tatiana - Souček, Pavel - Maydannik, Philipp - Cameron, David Campbell - Lackner, Jürgen
PY  - 2015
TI  - Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates
JF  - Surface & Coatings Technology
VL  - 284
IS  - December
SP  - 198-205
EP  - 198-205
SN  - 02578972
KW  - Nanolaminates;Multilayer;ALD;Hardness;Mechanical Properties;Zinc Oxide
KW  - Aluminium Oxide
UR  - http://www.sciencedirect.com/science/article/pii/S0257897215004922
N2  - Nanoscale structures of aluminium oxide (Al2O3) and zinc oxide (ZnO) multilayers (nanolaminates) were prepared by atomic layer deposition (ALD) on silicon substrates at 120 °C. The focus of this work was to study the effects of bilayer period on mechanical properties and the effect of the ratio between the thicknesses of each material with bilayer period kept constant. We found that reduction of bilayer period led to an increase in hardness of the nanolaminates, which was explained by the Hall–Petch effect. The influence on hardness of the thickness ratio between Al2O3 and ZnO, where it increased by 50% for Al2O3/ZnO = 1:24 with bilayer period = 25 nm was observed. Progressive scratch tests revealed that the highest critical load for delamination and the highest toughness was observed for samples with Al2O3/ZnO = 24:1 with bilayer period = 25 nm.
ER  -

HOMOLA, Tomáš; Vilma BURŠÍKOVÁ; Tatiana IVANOVA; Pavel SOUČEK; Philipp MAYDANNIK; David Campbell CAMERON a Jürgen LACKNER. Mechanical properties of atomic layer deposited Al2O3/ZnO nanolaminates. \textit{Surface \&{} Coatings Technology}. 2015, roč.~284, December, s.~198-205. ISSN~0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2015.07.078.

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