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@inproceedings{1358784,
author = {Dugáček, Ján and Sťahel, Pavel and Čech, Jan and Jurmanová, Jana},
address = {Brno},
booktitle = {Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers},
editor = {Mirko Černák, Tomáš Hoder},
keywords = {plasma; discharge; WPR-CDBD; decontamination},
howpublished = {tištěná verze "print"},
language = {eng},
location = {Brno},
isbn = {978-80-210-8318-9},
pages = {287-290},
publisher = {Masarykova univerzita; Jednota českých matematiků a fyziků},
title = {WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY},
url = {https://munispace.muni.cz/index.php/munispace/catalog/book/836},
year = {2016}
}
TY - JOUR
ID - 1358784
AU - Dugáček, Ján - Sťahel, Pavel - Čech, Jan - Jurmanová, Jana
PY - 2016
TI - WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY
PB - Masarykova univerzita; Jednota českých matematiků a fyziků
CY - Brno
SN - 9788021083189
KW - plasma
KW - discharge
KW - WPR-CDBD
KW - decontamination
UR - https://munispace.muni.cz/index.php/munispace/catalog/book/836
N2 - Unwanted organic contamination of the surface of SEM samples or vacuum chambers often causes reductions of the SEM image quality, e. g. brightness or contrast of image, which worsen over time. This is the reason why the regular cleaning of the surface of the sample or vacuum chamber is necessary. In the presented paper, a novel method for SEM samples organic decontamination based on wide-pressure-range coplanar dielectric barrier discharge was investigated. WPR-CDBD efficiency for various organic compounds’ removal, including heavy hydrocarbons, was proved. Comparison with standard commercial plasma decontaminator XEI working with remote plasma was made.
ER -
DUGÁČEK, Ján, Pavel SŤAHEL, Jan ČECH a Jana JURMANOVÁ. WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY. In Mirko Černák, Tomáš Hoder. \textit{Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers}. Brno: Masarykova univerzita; Jednota českých matematiků a fyziků. s.~287-290. ISBN~978-80-210-8318-9. 2016.
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