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@article{1366455,
author = {Klimashin, Fedor F. and Koutná, Nikola and Euchner, Holger and Holec, David and Mayrhofer, Paul H.},
article_location = {Melville},
article_number = {18},
doi = {http://dx.doi.org/10.1063/1.4966664},
keywords = {molybdenum nitride; PVD; vacancies},
language = {eng},
issn = {0021-8979},
journal = {Journal of Applied Physics},
title = {The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films},
url = {https://aip.scitation.org/doi/10.1063/1.4966664},
volume = {120},
year = {2016}
}
TY - JOUR
ID - 1366455
AU - Klimashin, Fedor F. - Koutná, Nikola - Euchner, Holger - Holec, David - Mayrhofer, Paul H.
PY - 2016
TI - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films
JF - Journal of Applied Physics
VL - 120
IS - 18
SP - "nestrankovano"
EP - "nestrankovano"
PB - AMER INST PHYSICS
SN - 00218979
KW - molybdenum nitride
KW - PVD
KW - vacancies
UR - https://aip.scitation.org/doi/10.1063/1.4966664
L2 - https://aip.scitation.org/doi/10.1063/1.4966664
N2 - Based on a combined computational and experimental study, we show that besides the thermodynamically stable beta-MoN0.5 and delta(2)-MoN phases, also metastable gamma-MoNx and its ordered relative gamma'-MoNx can be synthesized by physical vapor deposition. The formation of the NaCl-based gamma-MoNx phase is favored for nitrogen concentrations between 23 and 34 at.% (i.e., x = 0.30-0.53). Higher nitrogen contents (close to the 3:2 stoichiometry, hence, MoN0.67) favor the ordering of the vacancies at the nitrogen sublattice (hence, gamma'-MoNx). The highest hardness of similar to 33 GPa is obtained for single-phase cubic-structured gamma-MoN0.53 coatings, whereas the ordered gamma'-MoN0.67 coatings are slightly softer with a hardness of similar to 28 GPa.
ER -
KLIMASHIN, Fedor F., Nikola KOUTNÁ, Holger EUCHNER, David HOLEC a Paul H. MAYRHOFER. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo-N thin films. \textit{Journal of Applied Physics}. Melville: AMER INST PHYSICS, roč.~120, č.~18, s.~''nestrankovano'', 10 s. ISSN~0021-8979. doi:10.1063/1.4966664. 2016.
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