Deposition of Functional Plasma Polymers Influenced by Reactor
Geometry in Capacitively Coupled Discharges

J 2016

Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges

HEGEMANN, Dirk; Miroslav MICHLÍČEK; Noemi E. BLANCHARD; Urs SCHUTZ; Dominik LOHMANN et al.

Základní údaje

Originální název

Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges

Autoři

HEGEMANN, Dirk; Miroslav MICHLÍČEK; Noemi E. BLANCHARD; Urs SCHUTZ; Dominik LOHMANN; Marianne VANDENBOSSCHE; Lenka ZAJÍČKOVÁ a Martin DRABIK

Vydání

Plasma processes and polymers, Weinheim, Wiley-VCH, 2016, 1612-8850

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Německo

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.846

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14740/16:00093843

Organizační jednotka

Středoevropský technologický institut

Klíčová slova anglicky

plasma polymer; functional groups; ion bombardment; cross-linking; aging

Štítky

rivok

Změněno: 19. 9. 2017 04:51, doc. Mgr. Lenka Zajíčková, Ph.D.

Anotace

V originále

The deposition of functional plasma polymers such as a-C:H:O films is mainly influenced by fragmentation of the parent molecules in the gas phase as well as by the energetic conditions during film growth at the surface. The influence of gas phase and surface processes on the a-C:H:O film properties was thus investigated in order to optimize cross-linking and functional group density. The control of both conditions enables permanent functional plasma polymer films deposited within different reactor geometries (capacitively coupled symmetric vs. asymmetric at driven electrode and at grounded electrode). Comparison and up-scaling of such plasma polymerization processes are facilitated by knowing the internal energy input into the plasma and into the growing film surface.

Návaznosti

ED1.1.00/02.0068, projekt VaV

Název: CEITEC - central european institute of technology

Citovat

HEGEMANN, Dirk; Miroslav MICHLÍČEK; Noemi E. BLANCHARD; Urs SCHUTZ; Dominik LOHMANN; Marianne VANDENBOSSCHE; Lenka ZAJÍČKOVÁ a Martin DRABIK. Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges. Plasma processes and polymers. Weinheim: Wiley-VCH, 2016, roč. 13, č. 2, s. 279-286. ISSN 1612-8850. Dostupné z: https://doi.org/10.1002/ppap.201500078.

@article{1375027,
   author = {Hegemann, Dirk and Michlíček, Miroslav and Blanchard, Noemi E. and Schutz, Urs and Lohmann, Dominik and Vandenbossche, Marianne and Zajíčková, Lenka and Drabik, Martin},
   article_location = {Weinheim},
   article_number = {2},
   doi = {https://doi.org/10.1002/ppap.201500078},
   keywords = {plasma polymer; functional groups; ion bombardment; cross-linking; aging},
   language = {eng},
   issn = {1612-8850},
   journal = {Plasma processes and polymers},
   title = {Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges},
   url = {http://onlinelibrary.wiley.com/doi/10.1002/ppap.201500078/abstract;jsessionid=786281515922DCBB841ACC7AB907CF9C.f04t01?systemMessage=Pay+per+view+article+purchase%28PPV%29+on+Wiley+Online+Library+will+be+unavailable+on+Saturday+11th+March+from+05%3A00-14%},
   volume = {13},
   year = {2016}
}

TY  - JOUR
ID  - 1375027
AU  - Hegemann, Dirk - Michlíček, Miroslav - Blanchard, Noemi E. - Schutz, Urs - Lohmann, Dominik - Vandenbossche, Marianne - Zajíčková, Lenka - Drabik, Martin
PY  - 2016
TI  - Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges
JF  - Plasma processes and polymers
VL  - 13
IS  - 2
SP  - 279-286
EP  - 279-286
PB  - Wiley-VCH
SN  - 16128850
KW  - plasma polymer
KW  - functional groups
KW  - ion bombardment
KW  - cross-linking
KW  - aging
UR  - http://onlinelibrary.wiley.com/doi/10.1002/ppap.201500078/abstract;jsessionid=786281515922DCBB841ACC7AB907CF9C.f04t01?systemMessage=Pay+per+view+article+purchase%28PPV%29+on+Wiley+Online+Library+will+be+unavailable+on+Saturday+11th+March+from+05%3A00-14%
L2  - http://onlinelibrary.wiley.com/doi/10.1002/ppap.201500078/abstract;jsessionid=786281515922DCBB841ACC7AB907CF9C.f04t01?systemMessage=Pay+per+view+article+purchase%28PPV%29+on+Wiley+Online+Library+will+be+unavailable+on+Saturday+11th+March+from+05%3A00-14%
N2  - The deposition of functional plasma polymers such as a-C:H:O films is mainly influenced by fragmentation of the parent molecules in the gas phase as well as by the energetic conditions during film growth at the surface. The influence of gas phase and surface processes on the a-C:H:O film properties was thus investigated in order to optimize cross-linking and functional group density. The control of both conditions enables permanent functional plasma polymer films deposited within different reactor geometries (capacitively coupled symmetric vs. asymmetric at driven electrode and at grounded electrode). Comparison and up-scaling of such plasma polymerization processes are facilitated by knowing the internal energy input into the plasma and into the growing film surface.
ER  -

HEGEMANN, Dirk; Miroslav MICHLÍČEK; Noemi E. BLANCHARD; Urs SCHUTZ; Dominik LOHMANN; Marianne VANDENBOSSCHE; Lenka ZAJÍČKOVÁ a Martin DRABIK. Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges. \textit{Plasma processes and polymers}. Weinheim: Wiley-VCH, 2016, roč.~13, č.~2, s.~279-286. ISSN~1612-8850. Dostupné z: https://doi.org/10.1002/ppap.201500078.

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