Materials Pushing the Application Limits of Wire Grid
Polarizers further into the Deep Ultraviolet Spectral Range

J 2016

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

SIEFKE, Thomas; Stefanie KROKER; Kristin PFEIFFER; Oliver PUFFKY; Kay DIETRICH et. al.

Základní údaje

Originální název

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Autoři

SIEFKE, Thomas; Stefanie KROKER; Kristin PFEIFFER; Oliver PUFFKY; Kay DIETRICH; Daniel FRANTA; Ivan OHLÍDAL; Adriana SZEGHALMI; Ernst-Bernhard KLEY a Andreas TÜNNERMANN

Vydání

Advanced Optical Materials, 2016, 2195-1071

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Německo

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 6.875

Kód RIV

RIV/00216224:14310/16:00093988

Organizační jednotka

Přírodovědecká fakulta

DOI

https://doi.org/10.1002/adom.201600250

UT WoS

000392404200016

EID Scopus

2-s2.0-84978288747

Klíčová slova anglicky

Wire Grid Polarizers; Dispersion model; Films; Lithography

Štítky

AKR, rivok

Změněno: 6. 4. 2017 22:20, Ing. Andrea Mikešková

Anotace

V originále

Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

SIEFKE, Thomas; Stefanie KROKER; Kristin PFEIFFER; Oliver PUFFKY; Kay DIETRICH; Daniel FRANTA; Ivan OHLÍDAL; Adriana SZEGHALMI; Ernst-Bernhard KLEY a Andreas TÜNNERMANN. Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range. Advanced Optical Materials. 2016, roč. 4, č. 11, s. 1780-1786. ISSN 2195-1071. Dostupné z: https://doi.org/10.1002/adom.201600250.

@article{1376392,
   author = {Siefke, Thomas and Kroker, Stefanie and Pfeiffer, Kristin and Puffky, Oliver and Dietrich, Kay and Franta, Daniel and Ohlídal, Ivan and Szeghalmi, Adriana and Kley, ErnstandBernhard and Tünnermann, Andreas},
   article_number = {11},
   doi = {https://doi.org/10.1002/adom.201600250},
   keywords = {Wire Grid Polarizers; Dispersion model; Films; Lithography},
   language = {eng},
   issn = {2195-1071},
   journal = {Advanced Optical Materials},
   title = {Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range},
   url = {http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract},
   volume = {4},
   year = {2016}
}

TY  - JOUR
ID  - 1376392
AU  - Siefke, Thomas - Kroker, Stefanie - Pfeiffer, Kristin - Puffky, Oliver - Dietrich, Kay - Franta, Daniel - Ohlídal, Ivan - Szeghalmi, Adriana - Kley, Ernst-Bernhard - Tünnermann, Andreas
PY  - 2016
TI  - Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
JF  - Advanced Optical Materials
VL  - 4
IS  - 11
SP  - 1780-1786
EP  - 1780-1786
SN  - 21951071
KW  - Wire Grid Polarizers
KW  - Dispersion model
KW  - Films
KW  - Lithography
UR  - http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract
N2  - Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.
ER  -

SIEFKE, Thomas; Stefanie KROKER; Kristin PFEIFFER; Oliver PUFFKY; Kay DIETRICH; Daniel FRANTA; Ivan OHLÍDAL; Adriana SZEGHALMI; Ernst-Bernhard KLEY a Andreas TÜNNERMANN. Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range. \textit{Advanced Optical Materials}. 2016, roč.~4, č.~11, s.~1780-1786. ISSN~2195-1071. Dostupné z: https://doi.org/10.1002/adom.201600250.

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