| KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA, Marta ŠLAPANSKÁ, Miroslav ZEMÁNEK a Petr VAŠINA. Cathode voltage and discharge current oscillations in HiPIMS. Plasma Sources Science and Technology. Bristol: IOP Publishing LTD, 2017, roč. 26, č. 5, s. nestránkováno, 12 s. ISSN 0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/aa62ee. |
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@article{1378966,
author = {Klein, Peter and Hnilica, Jaroslav and Hubička, Zdeněk and Čada, Martin and Šlapanská, Marta and Zemánek, Miroslav and Vašina, Petr},
article_location = {Bristol},
article_number = {5},
doi = {http://dx.doi.org/10.1088/1361-6595/aa62ee},
keywords = {HiPIMS; voltage and current oscillations; spokes},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Cathode voltage and discharge current oscillations in HiPIMS},
url = {http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee},
volume = {26},
year = {2017}
}
TY - JOUR
ID - 1378966
AU - Klein, Peter - Hnilica, Jaroslav - Hubička, Zdeněk - Čada, Martin - Šlapanská, Marta - Zemánek, Miroslav - Vašina, Petr
PY - 2017
TI - Cathode voltage and discharge current oscillations in HiPIMS
JF - Plasma Sources Science and Technology
VL - 26
IS - 5
SP - nestránkováno
EP - nestránkováno
PB - IOP Publishing LTD
SN - 09630252
KW - HiPIMS
KW - voltage and current oscillations
KW - spokes
UR - http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee
L2 - http://iopscience.iop.org/article/10.1088/1361-6595/aa62ee
N2 - This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a high-power impulse magnetron sputtering pulse. Detailed experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations originated from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the absence of spokes were found. The oscillations were not caused by the rotational motion of the spokes but emerged when a certain threshold amount of spokes was overreached.
ER -
KLEIN, Peter, Jaroslav HNILICA, Zdeněk HUBIČKA, Martin ČADA, Marta ŠLAPANSKÁ, Miroslav ZEMÁNEK a Petr VAŠINA. Cathode voltage and discharge current oscillations in HiPIMS. \textit{Plasma Sources Science and Technology}. Bristol: IOP Publishing LTD, 2017, roč.~26, č.~5, s.~nestránkováno, 12 s. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/aa62ee.
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