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@proceedings{1385042, author = {Fekete, Matej and Hnilica, Jaroslav and Souček, Pavel and Zábranský, Lukáš and Vašina, Petr}, booktitle = {SVC TechCon 2017}, keywords = {m-HiPIMS; EBF; titanium}, language = {eng}, title = {Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process}, year = {2017} }
TY - CONF ID - 1385042 AU - Fekete, Matej - Hnilica, Jaroslav - Souček, Pavel - Zábranský, Lukáš - Vašina, Petr PY - 2017 TI - Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process KW - m-HiPIMS KW - EBF KW - titanium N2 - The aim of this paper is to study the temporal evolutions of sputtered species number densities during a preceding (P) and a subsequent (S) pulse in a multi-pulse HiPIMS. The Ti atom number density does not reach the maximum at the time of the maximal discharge current. It is shown that the residual particles from the P pulse are presented at the beginning of the S pulse even for the longest studied delay between the P and the S pulse. The ionization fractions of sputtered species attained at the end of the S pulses are always lower compared to the P pulse. The coatings produced by multi-pulse HiPIMS exhibited decreased roughness and increased hardness in comparison with standard HiPIMS and DC magnetron sputtered coating. ER -
FEKETE, Matej, Jaroslav HNILICA, Pavel SOUČEK, Lukáš ZÁBRANSKÝ a Petr VAŠINA. Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process. In \textit{SVC TechCon 2017}. 2017. ISSN~0737-5921.
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