| FALUB, Claudiu V., Hartmut ROHRMANN, Martin BLESS, Mojmír MEDUŇA, Miguel MARIONI, Daniel SCHNEIDER, Jan H. RICHTER a Marco PADRUN. Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications. Online. AIP Advances. MELVILLE: AMER INST PHYSICS, 2017, roč. 7, č. 5, s. nestránkováno, 7 s. ISSN 2158-3226. Dostupné z: https://dx.doi.org/10.1063/1.4973945. [citováno 2024-04-24] |
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@article{1387381,
author = {Falub, Claudiu V. and Rohrmann, Hartmut and Bless, Martin and Meduňa, Mojmír and Marioni, Miguel and Schneider, Daniel and Richter, Jan H. and Padrun, Marco},
article_location = {MELVILLE},
article_number = {5},
doi = {http://dx.doi.org/10.1063/1.4973945},
keywords = {ferromagnetic-resonance frequency; on-chip inductors; x-ray-scattering; thin-films; roughness; anisotropy; band},
language = {eng},
issn = {2158-3226},
journal = {AIP Advances},
title = {Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications},
url = {http://aip.scitation.org/doi/abs/10.1063/1.4973945},
volume = {7},
year = {2017}
}
TY - JOUR
ID - 1387381
AU - Falub, Claudiu V. - Rohrmann, Hartmut - Bless, Martin - Meduňa, Mojmír - Marioni, Miguel - Schneider, Daniel - Richter, Jan H. - Padrun, Marco
PY - 2017
TI - Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications
JF - AIP Advances
VL - 7
IS - 5
SP - nestránkováno
EP - nestránkováno
PB - AMER INST PHYSICS
SN - 21583226
KW - ferromagnetic-resonance frequency
KW - on-chip inductors
KW - x-ray-scattering
KW - thin-films
KW - roughness
KW - anisotropy
KW - band
UR - http://aip.scitation.org/doi/abs/10.1063/1.4973945
L2 - http://aip.scitation.org/doi/abs/10.1063/1.4973945
N2 - Soft magnetic Ni78.5Fe21.5, Co91.5Ta4.5Zr4 and Fe52Co28B20 thin films laminated with SiO2, Al2O3, AlN, and Ta2O5 dielectric interlayers were deposited on 8” Si wafers using DC, pulsed DC and RF cathodes in the industrial, high-throughput Evatec LLS-EVO-II magnetron sputtering system.
ER -
FALUB, Claudiu V., Hartmut ROHRMANN, Martin BLESS, Mojmír MEDUŇA, Miguel MARIONI, Daniel SCHNEIDER, Jan H. RICHTER a Marco PADRUN. Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications. Online. \textit{AIP Advances}. MELVILLE: AMER INST PHYSICS, 2017, roč.~7, č.~5, s.~nestránkováno, 7 s. ISSN~2158-3226. Dostupné z: https://dx.doi.org/10.1063/1.4973945. [citováno 2024-04-24]
|
