J 2017

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

KLENOVSKÝ, Petr, Jaroslav ZŮDA, Petr KLAPETEK and Josef HUMLÍČEK

Basic information

Original name

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

Authors

KLENOVSKÝ, Petr (203 Czech Republic, belonging to the institution), Jaroslav ZŮDA (203 Czech Republic), Petr KLAPETEK (203 Czech Republic, belonging to the institution) and Josef HUMLÍČEK (203 Czech Republic, guarantor, belonging to the institution)

Edition

Applied Surface Science, AMSTERDAM, ELSEVIER SCIENCE BV, 2017, 0169-4332

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 4.439

RIV identification code

RIV/00216224:14310/17:00097975

Organization unit

Faculty of Science

DOI

UT WoS

000408756700043

Keywords in English

Silicon; Surface layers; Ellipsometry; 1-kg mass standard

Tags

Tags

International impact, Reviewed
Změněno: 3/4/2018 14:21, Ing. Nicole Zrilić

Abstract

ORIG CZ

V originále

We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved.

In Czech

Studovali jsme povrchové vrstvy na monokrystalické kouli z n-typu zonálního křemíku ( 2400-2990 Ohm.cm) s průměrem 93.6004 mm. Elipsometrická spektra ve viditelné a ultrafialové oblasti dokumentují přítomnost tenkých vrstev amorfního Si a oxidu křemíku, Připravili jsme rovněž sérii plochých vzorků Si, leštěných pomocí zrn v rozsahu 1-6 mikronů; tyto vzorky byly zkoumány elipsometrickou technikou ve střední infračervené oblasti, včetně oboru poláírních vibrací vazeb Si-O. Modely povrchu koule byly testovány pomocí měření AFM.

Links

LQ1601, research and development project
Name: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR