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@proceedings{1398321,
author = {Kroker, Michael and Souček, Pavel and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr},
booktitle = {16th International Conference on Reactive Sputter Deposition},
keywords = {WBC; coating; EDS; SEM; RBS; TRIM; SRIM; segmented target; magnetron sputtering},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target},
year = {2017}
}
TY - CONF
ID - 1398321
AU - Kroker, Michael - Souček, Pavel - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr
PY - 2017
TI - Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target
SN - 9788026107545
KW - WBC
KW - coating
KW - EDS
KW - SEM
KW - RBS
KW - TRIM
KW - SRIM
KW - segmented target
KW - magnetron sputtering
N2 - W-B-C coatings in this study were synthesized using magnetron sputtering from a single segmented cylindrical target in an industrial configuration. Advanced segmented target was used to precise controlling chemical composition of coating. The target was composed of W, C, B4C cylindrical segments with same radii but different heights. Highly-inhomogeneous coatings were deposited on various substrates to determine the influence of chemical composition on coatings properties afterwards.The depositions were carried out at 450 °C.
ER -
KROKER, Michael, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ a Petr VAŠINA. Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target. In \textit{16th International Conference on Reactive Sputter Deposition}. 2017. ISBN~978-80-261-0754-5.
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