Další formáty:
BibTeX
LaTeX
RIS
@proceedings{1398321, author = {Kroker, Michael and Souček, Pavel and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr}, booktitle = {16th International Conference on Reactive Sputter Deposition}, keywords = {WBC; coating; EDS; SEM; RBS; TRIM; SRIM; segmented target; magnetron sputtering}, language = {eng}, isbn = {978-80-261-0754-5}, title = {Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target}, year = {2017} }
TY - CONF ID - 1398321 AU - Kroker, Michael - Souček, Pavel - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr PY - 2017 TI - Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target SN - 9788026107545 KW - WBC KW - coating KW - EDS KW - SEM KW - RBS KW - TRIM KW - SRIM KW - segmented target KW - magnetron sputtering N2 - W-B-C coatings in this study were synthesized using magnetron sputtering from a single segmented cylindrical target in an industrial configuration. Advanced segmented target was used to precise controlling chemical composition of coating. The target was composed of W, C, B4C cylindrical segments with same radii but different heights. Highly-inhomogeneous coatings were deposited on various substrates to determine the influence of chemical composition on coatings properties afterwards.The depositions were carried out at 450 °C. ER -
KROKER, Michael, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ a Petr VAŠINA. Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target. In \textit{16th International Conference on Reactive Sputter Deposition}. 2017. ISBN~978-80-261-0754-5.
|