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@proceedings{1398851,
author = {Klein, Peter and Hnilica, Jaroslav and Lockwood Estrin, Francis and Vašina, Petr and W. Bradley, James},
booktitle = {16th International Conference on Reactive Sputter Deposition},
keywords = {magnetron; spokes; HiPIMS},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Report on spoke rotation, merging and splitting in HiPIMS plasma},
year = {2017}
}
TY - CONF
ID - 1398851
AU - Klein, Peter - Hnilica, Jaroslav - Lockwood Estrin, Francis - Vašina, Petr - W. Bradley, James
PY - 2017
TI - Report on spoke rotation, merging and splitting in HiPIMS plasma
SN - 9788026107545
KW - magnetron
KW - spokes
KW - HiPIMS
N2 - The presented spoke study was performed in both non-reactive as well as reactive nitrogen HiPIMS plasma using simultaneous broadband optical screening via ICCD camera (200 ns time scale) and strip probes embedded into the niobium target. Strip probes measured actual local current delivered to the target. Spoke merging and splitting was detected by both employed methods.
ER -
KLEIN, Peter, Jaroslav HNILICA, Francis LOCKWOOD ESTRIN, Petr VAŠINA a James W. BRADLEY. Report on spoke rotation, merging and splitting in HiPIMS plasma. In \textit{16th International Conference on Reactive Sputter Deposition}. 2017. ISBN~978-80-261-0754-5.
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