| FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL, Henri SIBUET, Daniel SCHNEIDER, Martin BLESS, Jan H. RICHTER a Hartmut ROHRMANN. Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications. IEEE TRANSACTIONS ON MAGNETICS. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, roč. 53, č. 11, s. 2002906-2002911. ISSN 0018-9464. Dostupné z: https://dx.doi.org/10.1109/TMAG.2017.2703175. |
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@article{1403090,
author = {Falub, Claudiu Valentin and Hida, Rachid and Meduňa, Mojmír and Zweck, Josef and Michel, JeanandPhilippe and Sibuet, Henri and Schneider, Daniel and Bless, Martin and Richter, Jan H. and Rohrmann, Hartmut},
article_location = {PISCATAWAY},
article_number = {11},
doi = {http://dx.doi.org/10.1109/TMAG.2017.2703175},
keywords = {FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials},
language = {eng},
issn = {0018-9464},
journal = {IEEE TRANSACTIONS ON MAGNETICS},
title = {Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications},
url = {http://ieeexplore.ieee.org/abstract/document/7924320/},
volume = {53},
year = {2017}
}
TY - JOUR
ID - 1403090
AU - Falub, Claudiu Valentin - Hida, Rachid - Meduňa, Mojmír - Zweck, Josef - Michel, Jean-Philippe - Sibuet, Henri - Schneider, Daniel - Bless, Martin - Richter, Jan H. - Rohrmann, Hartmut
PY - 2017
TI - Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications
JF - IEEE TRANSACTIONS ON MAGNETICS
VL - 53
IS - 11
SP - 2002906
EP - 2002906
PB - IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
SN - 00189464
KW - FeCoB
KW - high-frequency permeability
KW - magnetic multilayers
KW - magnetron sputtering
KW - soft magnetic materials
UR - http://ieeexplore.ieee.org/abstract/document/7924320/
L2 - http://ieeexplore.ieee.org/abstract/document/7924320/
N2 - In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.
ER -
FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL, Henri SIBUET, Daniel SCHNEIDER, Martin BLESS, Jan H. RICHTER a Hartmut ROHRMANN. Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications. \textit{IEEE TRANSACTIONS ON MAGNETICS}. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, roč.~53, č.~11, s.~2002906-2002911. ISSN~0018-9464. Dostupné z: https://dx.doi.org/10.1109/TMAG.2017.2703175.
|
