Optical characterization of randomly microrough surfaces
covered with very thin overlayers using effective medium
approximation and Rayleigh-Rice theory

J 2017

Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA

Základní údaje

Originální název

Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory

Autoři

OHLÍDAL, Ivan (203 Česká republika, garant, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Martin ČERMÁK (203 Česká republika, domácí) a Daniel FRANTA (203 Česká republika, domácí)

Vydání

Applied Surface Science, AMSTERDAM, Elsevier Science, 2017, 0169-4332

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Nizozemské království

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.439

Kód RIV

RIV/00216224:14310/17:00100085

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.apsusc.2017.04.211

UT WoS

000404816900109

Klíčová slova anglicky

Ellipsometry;Thin films;Roughness;Effective medium approximation;Rayleigh-Rice theory

Štítky

NZ, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 10. 4. 2018 11:49, Ing. Nicole Zrilić

Anotace

V originále

The modification of the effective medium approximation for randomly microrough surfaces covered by very thin overlayers based on inhomogeneous fictitious layers is formulated. The numerical analysis of this modification is performed using simulated ellipsometric data calculated using the Rayleigh–Rice theory. The system used to perform this numerical analysis consists of a randomly microrough silicon single crystal surface covered with a SiO2 overlayer. A comparison to the effective medium approximation based on homogeneous fictitious layers is carried out within this numerical analysis. For ellipsometry of the system mentioned above the possibilities and limitations of both the effective medium approximation approaches are discussed. The results obtained by means of the numerical analysis are confirmed by the ellipsometric characterization of two randomly microrough silicon single crystal substrates covered with native oxide overlayers. It is shown that the effective medium approximation approaches for this system exhibit strong deficiencies compared to the Rayleigh–Rice theory. The practical consequences implied by these results are presented. The results concerning the random microroughness are verified by means of measurements performed using atomic force microscopy.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA. Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory. Applied Surface Science. AMSTERDAM: Elsevier Science, 2017, roč. 419, October, s. 942-956. ISSN 0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2017.04.211.

@article{1409203,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Čermák, Martin and Franta, Daniel},
   article_location = {AMSTERDAM},
   article_number = {October},
   doi = {http://dx.doi.org/10.1016/j.apsusc.2017.04.211},
   keywords = {Ellipsometry;Thin films;Roughness;Effective medium approximation;Rayleigh-Rice theory},
   language = {eng},
   issn = {0169-4332},
   journal = {Applied Surface Science},
   title = {Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory},
   url = {https://www.sciencedirect.com/science/article/pii/S0169433217312473},
   volume = {419},
   year = {2017}
}

TY  - JOUR
ID  - 1409203
AU  - Ohlídal, Ivan - Vohánka, Jiří - Čermák, Martin - Franta, Daniel
PY  - 2017
TI  - Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory
JF  - Applied Surface Science
VL  - 419
IS  - October
SP  - 942-956
EP  - 942-956
PB  - Elsevier Science
SN  - 01694332
KW  - Ellipsometry;Thin films;Roughness;Effective medium approximation;Rayleigh-Rice theory
UR  - https://www.sciencedirect.com/science/article/pii/S0169433217312473
N2  - The modification of the effective medium approximation for randomly microrough surfaces covered by very thin overlayers based on inhomogeneous fictitious layers is formulated. The numerical analysis of this modification is performed using simulated ellipsometric data calculated using the Rayleigh–Rice theory. The system used to perform this numerical analysis consists of a randomly microrough silicon single crystal surface covered with a SiO2 overlayer. A comparison to the effective medium approximation based on homogeneous fictitious layers is carried out within this numerical analysis. For ellipsometry of the system mentioned above the possibilities and limitations of both the effective medium approximation approaches are discussed. The results obtained by means of the numerical analysis are confirmed by the ellipsometric characterization of two randomly microrough silicon single crystal substrates covered with native oxide overlayers. It is shown that the effective medium approximation approaches for this system exhibit strong deficiencies compared to the Rayleigh–Rice theory. The practical consequences implied by these results are presented. The results concerning the random microroughness are verified by means of measurements performed using atomic force microscopy.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK a Daniel FRANTA. Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory. \textit{Applied Surface Science}. AMSTERDAM: Elsevier Science, 2017, roč.~419, October, s.~942-956. ISSN~0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2017.04.211.

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