VOHÁNKA, Jiří, Ivan OHLÍDAL, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK and Daniel FRANTA. Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization. Surface and Interface Analysis. Wiley, 2018, vol. 50, No 7, p. 757-765. ISSN 0142-2421. Available from: https://dx.doi.org/10.1002/sia.6473. |
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@article{1472976, author = {Vohánka, Jiří and Ohlídal, Ivan and Ženíšek, Jaroslav and Vašina, Petr and Čermák, Martin and Franta, Daniel}, article_number = {7}, doi = {http://dx.doi.org/10.1002/sia.6473}, keywords = {ellipsometry;inhomogeneous layers;optical characterization;silicon nitride}, language = {eng}, issn = {0142-2421}, journal = {Surface and Interface Analysis}, title = {Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization}, url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473}, volume = {50}, year = {2018} }
TY - JOUR ID - 1472976 AU - Vohánka, Jiří - Ohlídal, Ivan - Ženíšek, Jaroslav - Vašina, Petr - Čermák, Martin - Franta, Daniel PY - 2018 TI - Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization JF - Surface and Interface Analysis VL - 50 IS - 7 SP - 757-765 EP - 757-765 PB - Wiley SN - 01422421 KW - ellipsometry;inhomogeneous layers;optical characterization;silicon nitride UR - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473 L2 - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6473 N2 - A new approach to calculation of optical quantities of inhomogeneous layers is presented. In this approach, the Richardson extrapolation is used to improve the accuracy of the method, in which the inhomogeneous layer is approximated by a stack of thin homogeneous layers. The results presented in this paper are based on the assumption that the media are isotropic and the inhomogeneity is along the axis normal to the boundary. The results obtained by the new method are compared with those obtained without the Richardson extrapolation. The Richardson extrapolation brings significant improvement in accuracy, especially if the number of approximating layers is large. Moreover, the method using the Richardson extrapolation proceeds in steps with an error estimate available in each step; thus, the calculation can be stopped when the desired accuracy is reached. The use of the method is illustrated by means of the optical characterization of strongly inhomogeneous film of non-stoichiometric silicon nitride. ER -
VOHÁNKA, Jiří, Ivan OHLÍDAL, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK and Daniel FRANTA. Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization. \textit{Surface and Interface Analysis}. Wiley, 2018, vol.~50, No~7, p.~757-765. ISSN~0142-2421. Available from: https://dx.doi.org/10.1002/sia.6473.
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