Different theoretical approaches at optical characterization of
randomly rough silicon surfaces covered with native oxide
layers

J 2018

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK; Daniel FRANTA et al.

Základní údaje

Originální název

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

Autoři

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK a Daniel FRANTA

Vydání

Surface and Interface Analysis, Wiley, 2018, 0142-2421

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

odkaz na stránku nakladatele

Impakt faktor

Impact factor: 1.319

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/18:00104690

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

native oxide layers;optical characterization;roughness;silicon surfaces

Změněno: 2. 5. 2019 16:16, Mgr. Tereza Miškechová

Anotace

V originále

Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK a Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. Surface and Interface Analysis. Wiley, 2018, roč. 50, č. 11, s. 1230-1233. ISSN 0142-2421. Dostupné z: https://doi.org/10.1002/sia.6463.

@article{1472996,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Mistrík, Jan and Čermák, Martin and Franta, Daniel},
   article_number = {11},
   doi = {https://doi.org/10.1002/sia.6463},
   keywords = {native oxide layers;optical characterization;roughness;silicon surfaces},
   language = {eng},
   issn = {0142-2421},
   journal = {Surface and Interface Analysis},
   title = {Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers},
   url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463},
   volume = {50},
   year = {2018}
}

TY  - JOUR
ID  - 1472996
AU  - Ohlídal, Ivan - Vohánka, Jiří - Mistrík, Jan - Čermák, Martin - Franta, Daniel
PY  - 2018
TI  - Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers
JF  - Surface and Interface Analysis
VL  - 50
IS  - 11
SP  - 1230-1233
EP  - 1230-1233
PB  - Wiley
SN  - 01422421
KW  - native oxide layers;optical characterization;roughness;silicon surfaces
UR  - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
L2  - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
N2  - Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.
ER  -

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK a Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. \textit{Surface and Interface Analysis}. Wiley, 2018, roč.~50, č.~11, s.~1230-1233. ISSN~0142-2421. Dostupné z: https://doi.org/10.1002/sia.6463.

Přehled o publikaci