Influence of chemical composition on structure and mechanical
properties of  W-B-C coating deposited in industrial sputtering
system

a 2018

Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system

VAŠINA, Petr; Michael KROKER; Matej FEKETE; Lukáš ZÁBRANSKÝ; Vilma BURŠÍKOVÁ et al.

Základní údaje

Originální název

Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system

Autoři

VAŠINA, Petr; Michael KROKER; Matej FEKETE; Lukáš ZÁBRANSKÝ a Vilma BURŠÍKOVÁ

Vydání

The 83rd IUVSTA Workshop, 2018

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švédsko

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/18:00109105

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; thin films; protective coatings; W-B-C; tribological properties

Příznaky

Mezinárodní význam

Změněno: 8. 6. 2022 12:00, Mgr. Michael Kroker, Ph.D.

Anotace

V originále

Nowadays used hard protective coatings generally exhibit high hardness and high stiffness; however, these positive features are often accompanied by negative brittle deformation behaviour. The current trend in surface engineering is to sacrifice some of the hardness in favour of enhanced ductility and fracture toughness. Recently, there has been an increased interest in crystalline boron and carbon based nanolaminates with X2BC stoichiometry which are inherently nanolayered within the unit cell. According to the ab-initio models, these materials should exhibit an unusual combination of high stiffness and moderate ductility. A systematic theoretical study revealed that the nanolaminates with X = W should exhibit the best mechanical properties making them the best candidates for experimental synthesis. These W-B-C coatings were sputter deposited onto substrates performing a planetary motion around a patented central rotating cylindrical target composed from B4C, W and graphite segments in an industrial scale deposition system of company SHM. The deposition was performed at the temperature of 450 °C and bias of -100 V. Fine tuning of the chemical composition of the deposited samples was found to be crucial to grow the crystalline phase. Only the samples with the composition very close to the W2BC stoichiometry showed a narrow peak in the X-ray diffractogram at the 2theta angle of ~ 41° proving enhanced crystallinity. The samples deviating from the W2BC stoichiometry by only a few percent typically exhibited only a very broad peak centred at ~ 39° which was attributed to a short range ordered or a nearly amorphous structure. The SEM cross-section view revealed presence of a fine layered structure which was attributed to the planetary motion of the samples being repetitively directed towards and away from the target. The coatings were hard and of high fracture resistance, it was hard to form a crack in these coatings. The multilayer structure was probably beneficial for the fracture resistance as very often, the crack surface in the coating showed an irregular step-like character indicating deflection of the crack during the crack propagation.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

VAŠINA, Petr; Michael KROKER; Matej FEKETE; Lukáš ZÁBRANSKÝ a Vilma BURŠÍKOVÁ. Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system. In The 83rd IUVSTA Workshop. 2018.

@proceedings{1494637,
   author = {Vašina, Petr and Kroker, Michael and Fekete, Matej and Zábranský, Lukáš and Buršíková, Vilma},
   booktitle = {The 83rd IUVSTA Workshop},
   keywords = {magnetron sputtering; thin films; protective coatings; W-B-C; tribological properties},
   language = {eng},
   title = {Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system},
   year = {2018}
}

TY  - CONF
ID  - 1494637
AU  - Vašina, Petr - Kroker, Michael - Fekete, Matej - Zábranský, Lukáš - Buršíková, Vilma
PY  - 2018
TI  - Influence of chemical composition on structure and mechanical properties of W-B-C coating deposited in industrial sputtering system
KW  - magnetron sputtering
KW  - thin films
KW  - protective coatings
KW  - W-B-C
KW  - tribological properties
N2  - Nowadays used hard protective coatings generally exhibit high hardness and high stiffness; however, these positive features are often accompanied by negative brittle deformation behaviour. The current trend in surface engineering is to sacrifice some of the hardness in favour of enhanced ductility and fracture toughness. Recently, there has been an increased interest in crystalline boron and carbon based nanolaminates with X2BC stoichiometry which are inherently nanolayered within the unit cell. According to the ab-initio models, these materials should exhibit an unusual combination of high stiffness and moderate ductility. A systematic theoretical study revealed that the nanolaminates with X = W should exhibit the best mechanical properties making them the best candidates for experimental synthesis. These W-B-C coatings were sputter deposited onto substrates performing a planetary motion around a patented central rotating cylindrical target composed from B4C, W and graphite segments in an industrial scale deposition system of company SHM. The deposition was performed at the temperature of 450 °C and bias of -100 V. Fine tuning of the chemical composition of the deposited samples was found to be crucial to grow the crystalline phase. Only the samples with the composition very close to the W2BC stoichiometry showed a narrow peak in the X-ray diffractogram at the 2theta angle of ~ 41° proving enhanced crystallinity. The samples deviating from the W2BC stoichiometry by only a few percent typically exhibited only a very broad peak centred at ~ 39° which was attributed to a short range ordered or a nearly amorphous structure. The SEM cross-section view revealed presence of a fine layered structure which was attributed to the planetary motion of the samples being repetitively directed towards and away from the target. The coatings were hard and of high fracture resistance, it was hard to form a crack in these coatings. The multilayer structure was probably beneficial for the fracture resistance as very often, the crack surface in the coating showed an irregular step-like character indicating deflection of the crack during the crack propagation.
ER  -

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