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@inproceedings{1511516, author = {Kelarová, Štěpánka and Přibyl, Roman and Homola, Vojtěch and Václavik, Richard and Stupavská, Monika and Kelar, Lukáš and Buršíková, Vilma}, address = {Brno}, booktitle = {9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017)}, editor = {Czech Soc New Mat & Technol; Region Ctr Adv Technol & Mat}, keywords = {Plasma polymer films; plasma enhanced chemical vapor deposition; FTIR; nanoindentation}, howpublished = {paměťový nosič}, language = {eng}, location = {Brno}, isbn = {978-80-87294-81-9}, pages = {842-847}, publisher = {TANGER Ltd}, title = {ENVIRONMENTAL STABILITY OF NITROGEN CONTAINING PLASMA-POLYMERIZED HEXAMETHYLDISILOXANE FILMS}, year = {2018} }
TY - JOUR ID - 1511516 AU - Kelarová, Štěpánka - Přibyl, Roman - Homola, Vojtěch - Václavik, Richard - Stupavská, Monika - Kelar, Lukáš - Buršíková, Vilma PY - 2018 TI - ENVIRONMENTAL STABILITY OF NITROGEN CONTAINING PLASMA-POLYMERIZED HEXAMETHYLDISILOXANE FILMS PB - TANGER Ltd CY - Brno SN - 9788087294819 KW - Plasma polymer films KW - plasma enhanced chemical vapor deposition KW - FTIR KW - nanoindentation N2 - Nitrogen incorporated organosilicon films were prepared by means of plasma enhanced chemical vapor deposition using capacitively coupled RF glow discharges in mixtures of hexamethyldisiloxane and nitrogen. The flow rate of nitrogen was 2-10 sccm and the flow rate of hexamethyldisiloxane was 0.3-0.4 sccm. The power supply of CCP was 50 W. The environmental stability of the deposited films was studied using confocal microscopy, spectroscopic ellipsometry and FTIR (Fourier Transform Infrared Spectroscopy). The humidity induced structure changes resulted in substantial change of mechanical properties of the studied films. The mechanical properties were studied using nanoindentation techniques. ER -
KELAROVÁ, Štěpánka, Roman PŘIBYL, Vojtěch HOMOLA, Richard VÁCLAVIK, Monika STUPAVSKÁ, Lukáš KELAR a Vilma BURŠÍKOVÁ. ENVIRONMENTAL STABILITY OF NITROGEN CONTAINING PLASMA-POLYMERIZED HEXAMETHYLDISILOXANE FILMS. In Czech Soc New Mat \&{} Technol; Region Ctr Adv Technol \&{} Mat. \textit{9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH \&{} APPLICATION (NANOCON 2017)}. Brno: TANGER Ltd, 2018, s.~842-847. ISBN~978-80-87294-81-9.
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