On the origin of multilayered structure of W-B-C coatings
prepared by non-reactive magnetron sputtering from a single
segmented target

J 2019

On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target

KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK et. al.

Základní údaje

Originální název

On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target

Autoři

KROKER, Michael (203 Česká republika, domácí), Zsolt CZIGÁNY (348 Maďarsko), Weiss ZDENĚK (203 Česká republika), Matej FEKETE (703 Slovensko, domácí), Pavel SOUČEK (203 Česká republika, domácí), Katalin BALÁZSI (348 Maďarsko, domácí), Vjačeslav SOCHORA (203 Česká republika), Mojmír JÍLEK a Petr VAŠINA (203 Česká republika, garant, domácí)

Vydání

Surface & Coatings Technology, Lausanne, ELSEVIER SCIENCE SA, 2019, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.784

Kód RIV

RIV/00216224:14310/19:00107004

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.surfcoat.2019.07.077

UT WoS

000488417800002

Klíčová slova anglicky

Physical vapor deposition; WBC; Multi-axis rotation; Multilayer

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 24. 3. 2020 17:18, Mgr. Marie Šípková, DiS.

Anotace

V originále

Multilayered coatings are routinely obtained in non-reactive processes employing multiple sources or in processes with a reactive gas. W-B-C coatings were sputter deposited in an industrial sputtering system in a non-reactive atmosphere onto substrates performing one- and two-axis rotations around a central cylindrical target composed of boron-carbide, tungsten and graphite ring-shaped segments. This study describes the unexpected multilayered structure of W-B-C coatings deposited by even the non-reactive sputtering of a single target. This multilayered structure exhibits a modulation of the chemical composition. While the tungsten content in a layer decreases, the amount of boron and carbon rises. The modulation period corresponds with the calculated thickness increment per one sample revolution around the central cathode. Experiments proved that the chemical composition of a coating and its deposition rate are very sensitive to the substrate position in the chamber. This was attributed to the different transport pathways of heavy (W) and light (C and B) atoms sputtered from the same target, but differently scattered by the working argon gas.

Návaznosti

FV30262, projekt VaV

Název: Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí

Investor: Ministerstvo průmyslu a obchodu ČR, Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí

GA19-03899S, projekt VaV

Název: Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

Investor: Grantová agentura ČR, Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK a Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. Surface & Coatings Technology. Lausanne: ELSEVIER SCIENCE SA, 2019, roč. 377, č. 2019, s. 1-9. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077.

@article{1558616,
   author = {Kroker, Michael and Czigány, Zsolt and Zdeněk, Weiss and Fekete, Matej and Souček, Pavel and Balázsi, Katalin and Sochora, Vjačeslav and Jílek, Mojmír and Vašina, Petr},
   article_location = {Lausanne},
   article_number = {2019},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.07.077},
   keywords = {Physical vapor deposition; WBC; Multi-axis rotation; Multilayer},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & Coatings Technology},
   title = {On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target},
   url = {https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub},
   volume = {377},
   year = {2019}
}

TY  - JOUR
ID  - 1558616
AU  - Kroker, Michael - Czigány, Zsolt - Zdeněk, Weiss - Fekete, Matej - Souček, Pavel - Balázsi, Katalin - Sochora, Vjačeslav - Jílek, Mojmír - Vašina, Petr
PY  - 2019
TI  - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target
JF  - Surface & Coatings Technology
VL  - 377
IS  - 2019
SP  - 1-9
EP  - 1-9
PB  - ELSEVIER SCIENCE SA
SN  - 02578972
KW  - Physical vapor deposition
KW  - WBC
KW  - Multi-axis rotation
KW  - Multilayer
UR  - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub
L2  - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub
N2  - Multilayered coatings are routinely obtained in non-reactive processes employing multiple sources or in processes with a reactive gas. W-B-C coatings were sputter deposited in an industrial sputtering system in a non-reactive atmosphere onto substrates performing one- and two-axis rotations around a central cylindrical target composed of boron-carbide, tungsten and graphite ring-shaped segments. This study describes the unexpected multilayered structure of W-B-C coatings deposited by even the non-reactive sputtering of a single target. This multilayered structure exhibits a modulation of the chemical composition. While the tungsten content in a layer decreases, the amount of boron and carbon rises. The modulation period corresponds with the calculated thickness increment per one sample revolution around the central cathode. Experiments proved that the chemical composition of a coating and its deposition rate are very sensitive to the substrate position in the chamber. This was attributed to the different transport pathways of heavy (W) and light (C and B) atoms sputtered from the same target, but differently scattered by the working argon gas.
ER  -

KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK a Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. \textit{Surface \&{} Coatings Technology}. Lausanne: ELSEVIER SCIENCE SA, 2019, roč.~377, č.~2019, s.~1-9. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077.

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